18475701. METHOD FOR MANUFACTURING VIBRATOR simplified abstract (SEIKO EPSON CORPORATION)
Contents
- 1 METHOD FOR MANUFACTURING VIBRATOR
METHOD FOR MANUFACTURING VIBRATOR
Organization Name
Inventor(s)
Tsukasa Watanabe of Minamiminowa-mura (JP)
Keiichi Yamaguchi of Ina-shi (JP)
Shigeru Shiraishi of Ina-shi (JP)
Ryuta Nishizawa of Nagano-shi (JP)
METHOD FOR MANUFACTURING VIBRATOR - A simplified explanation of the abstract
This abstract first appeared for US patent application 18475701 titled 'METHOD FOR MANUFACTURING VIBRATOR
Simplified Explanation
The abstract describes a method for manufacturing a vibrator using a quartz crystal substrate with protective films and dry etching steps.
- Quartz crystal substrate is prepared with first and second surfaces.
- First protective film is formed in element formation region excluding groove formation regions.
- Dry etching is done on the substrate through the first protective film.
- Second protective film is formed in the first groove formation region.
- Dry etching is done on the substrate through both protective films.
Potential Applications
The technology can be applied in the manufacturing of electronic devices such as sensors, oscillators, and resonators.
Problems Solved
This method helps in creating precise and reliable vibrators with improved performance characteristics.
Benefits
The use of quartz crystal substrate ensures stability and accuracy in the vibrator's operation. The protective films protect the substrate during the manufacturing process, reducing the risk of damage.
Potential Commercial Applications
- "Manufacturing High-Performance Vibrators Using Quartz Crystal Substrate Method"
Possible Prior Art
There may be prior art related to the use of protective films and dry etching in the manufacturing of electronic components.
Unanswered Questions
How does this method compare to traditional vibrator manufacturing techniques?
This method using quartz crystal substrate and protective films may offer improved performance and reliability compared to traditional techniques. It would be interesting to see a direct comparison of the two methods in terms of efficiency, cost, and final product quality.
What are the specific characteristics of the vibrators produced using this method?
It would be helpful to know more about the performance characteristics of the vibrators manufactured using this method, such as frequency range, stability, and sensitivity. This information would be valuable for potential users and manufacturers looking to adopt this technology.
Original Abstract Submitted
A method for manufacturing a vibrator includes a preparation step of preparing a quartz crystal substrate having a first surface and a second surface which are in a front and back relationship, a first protective film formation step of forming a first protective film in a region of an element formation region other than a first groove formation region and a second groove formation region when a region of the quartz crystal substrate where the vibrator is formed is referred to as the element formation region, a region where the first groove is formed is referred to as the first groove formation region, and a region where the second groove is formed is referred to as the second groove formation region, a first dry etching step of dry etching the quartz crystal substrate from the first surface through the first protective film, a second protective film formation step of forming a second protective film in the first groove formation region, and a second dry etching step of dry etching the quartz crystal substrate from the first surface through the first protective film and the second protective film.
