18475685. METHOD FOR MANUFACTURING VIBRATOR simplified abstract (SEIKO EPSON CORPORATION)
Contents
- 1 METHOD FOR MANUFACTURING VIBRATOR
METHOD FOR MANUFACTURING VIBRATOR
Organization Name
Inventor(s)
Tsukasa Watanabe of Minamiminowa-mura (JP)
Keiichi Yamaguchi of Ina-shi (JP)
Shigeru Shiraishi of Ina-shi (JP)
Ryuta Nishizawa of Nagano-shi (JP)
METHOD FOR MANUFACTURING VIBRATOR - A simplified explanation of the abstract
This abstract first appeared for US patent application 18475685 titled 'METHOD FOR MANUFACTURING VIBRATOR
Simplified Explanation
The abstract describes a method for manufacturing a vibrator using a quartz crystal substrate with protective films and dry etching steps.
- Quartz crystal substrate used for vibrator manufacturing
- Formation of protective films in specific regions
- Dry etching process to shape the vibrator
Potential Applications
The technology could be used in the manufacturing of various electronic devices such as sensors, oscillators, and communication devices.
Problems Solved
This technology solves the problem of efficiently manufacturing vibrators with precise dimensions and properties for electronic applications.
Benefits
The method allows for the production of high-quality vibrators with improved performance and reliability due to the use of protective films and precise etching processes.
Potential Commercial Applications
The technology could be applied in industries such as telecommunications, consumer electronics, and medical devices for the production of advanced electronic components.
Possible Prior Art
Prior art in the field of microelectromechanical systems (MEMS) and semiconductor manufacturing processes may have similar methods for manufacturing vibrators using quartz substrates and protective films.
Unanswered Questions
How does this method compare to traditional vibrator manufacturing processes?
This method using quartz crystal substrates and protective films may offer advantages in terms of precision and performance compared to traditional manufacturing processes.
What are the potential limitations or challenges of implementing this manufacturing method on a large scale?
Challenges may include the scalability of the process, the cost-effectiveness of using quartz substrates, and the complexity of the protective film formation steps.
Original Abstract Submitted
A method for manufacturing a vibrator includes a preparation step of preparing a quartz crystal substrate having a first surface and a second surface which are in a front and back relationship, a first protective film formation step of forming a first protective film in a second groove formation region when a region of the quartz crystal substrate where the vibrator is formed is referred to as an element formation region, a region where the first groove is formed is referred to as a first groove formation region, and a region where the second groove is formed is referred to as the second groove formation region, a second protective film formation step of forming, in the first groove formation region, a second protective film having a lower etching rate than the first protective film, a third protective film formation step of forming a third protective film in a region of the element formation region other than the first groove formation region and the second groove formation region, and a first dry etching step of dry etching the quartz crystal substrate from the first surface through the first protective film, the second protective film, and the third protective film.
