18475673. METHOD FOR MANUFACTURING VIBRATOR simplified abstract (SEIKO EPSON CORPORATION)
Contents
METHOD FOR MANUFACTURING VIBRATOR
Organization Name
Inventor(s)
Tsukasa Watanabe of Minamiminowa-mura (JP)
Keiichi Yamaguchi of Ina-shi (JP)
Shigeru Shiraishi of Ina-shi (JP)
Ryuta Nishizawa of Nagano-shi (JP)
METHOD FOR MANUFACTURING VIBRATOR - A simplified explanation of the abstract
This abstract first appeared for US patent application 18475673 titled 'METHOD FOR MANUFACTURING VIBRATOR
Simplified Explanation
The abstract describes a method for manufacturing a vibrator using a quartz crystal substrate. Here is a simplified explanation of the patent application:
- Preparation step: Prepare a quartz crystal substrate with a front and back surface.
- First film formation step: Sequentially stack underlying films and a protective film on the front surface.
- First patterning step: Pattern the stacked body, leaving films in specific regions.
- First dry etching step: Dry etch the substrate through the stacked body.
Potential Applications: - Manufacturing of vibrators for various electronic devices. - Production of precise and efficient vibrating components for technology.
Problems Solved: - Providing a method for manufacturing vibrators with improved precision and performance. - Enhancing the durability and reliability of vibrating components.
Benefits: - Increased efficiency in vibrator production. - Improved quality and consistency of vibrating components.
Potential Commercial Applications: - Consumer electronics industry for smartphones, tablets, and wearable devices. - Medical devices for therapeutic or diagnostic purposes.
Possible Prior Art: - Prior methods of manufacturing vibrators using different materials or processes. - Research on quartz crystal substrates for electronic applications.
Unanswered Questions: 1. How does the specific patterning of the stacked body contribute to the overall performance of the vibrator? 2. Are there any limitations or challenges in scaling up this manufacturing method for mass production?
Original Abstract Submitted
A method for manufacturing a vibrator includes a preparation step of preparing a quartz crystal substrate having a first surface and a second surface which are in a front and back relationship, a first film formation step of forming a first stacked body by sequentially stacking a first underlying film, a second underlying film, and a first protective film at the first surface, a first patterning step of patterning the first stacked body in a manner in which the first underlying film, the second underlying film, and the first protective film remain in a region of an element formation region other than a first groove formation region and a second groove formation region, the first underlying film and the second underlying film remain in the first groove formation region, and the first underlying film remains in the second groove formation region, and a first dry etching step of dry etching the quartz crystal substrate from the first surface through the first stacked body.
