18387815. BROADBAND WAFER DEFECT DETECTION simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)
Contents
BROADBAND WAFER DEFECT DETECTION
Organization Name
Taiwan Semiconductor Manufacturing Company, Ltd.
Inventor(s)
Hsing-Piao Hsu of Taoyuan City (TW)
BROADBAND WAFER DEFECT DETECTION - A simplified explanation of the abstract
This abstract first appeared for US patent application 18387815 titled 'BROADBAND WAFER DEFECT DETECTION
Simplified Explanation
- System includes broadband light source, wafer, light sensors, and detector module - First light sensor detects reflected light from first side of wafer - Second light sensor detects emergent light from second side of wafer - Detector module analyzes reflected and emergent light to identify wafer defects
Potential Applications
- Quality control in semiconductor manufacturing - Defect detection in wafer production processes
Problems Solved
- Early detection of defects in wafers - Improved quality control in manufacturing processes
Benefits
- Increased efficiency in production processes - Reduction in defective products - Cost savings through early defect identification
Original Abstract Submitted
In an embodiment, a system includes: a broadband light source; a wafer with a first side facing the broadband light source; a first light sensor configured to detect reflected light from the broadband light source emanating from the first side; a second light sensor configured to detect emergent light emanating from a second side of the wafer opposite the first side, wherein the emergent light originates from the broadband light source; and a detector module configured to analyze the reflected light and the emergent light to identify wafer defects.
