18372811. LARGE DIAMETER POROUS PLUG FOR ARGON DELIVERY simplified abstract (Applied Materials, Inc.)

LARGE DIAMETER POROUS PLUG FOR ARGON DELIVERY

Organization Name

Applied Materials, Inc.

Inventor(s)

Tony Jefferson Gnanaprakasa of Mountain View CA (US)

Alvaro Garcia of Mountain View CA (US)

Martin Perez Guzman of Santa Clara CA (US)

Stephen Donald Prouty of San Jose CA (US)

LARGE DIAMETER POROUS PLUG FOR ARGON DELIVERY - A simplified explanation of the abstract

This abstract first appeared for US patent application 18372811 titled 'LARGE DIAMETER POROUS PLUG FOR ARGON DELIVERY

Simplified Explanation

The disclosure relates to a substrate support assembly for reducing the evacuation time when using argon gas. In one embodiment, a substrate support assembly includes a porous plug within the substrate support assembly. The porous plug includes a first cylindrical section with a first volume and axial length, a second cylindrical section with a second volume and axial length. The first cylindrical section has a larger volume than the second cylindrical section. The first cylindrical section and second cylindrical section have a volume ratio between about 2 and about 12. The first cylindrical section axial length and second cylindrical section axial length have a length ratio between about 2 and about 10.

• The substrate support assembly includes a porous plug with two cylindrical sections of different volumes and lengths.
• The volume ratio between the first and second cylindrical sections is between about 2 and about 12.
• The length ratio between the axial lengths of the first and second cylindrical sections is between about 2 and about 10.

Potential Applications

The technology could be applied in vacuum systems, semiconductor manufacturing, and other industries requiring efficient gas evacuation processes.

Problems Solved

This technology solves the problem of reducing evacuation time when using argon gas in substrate support assemblies, improving overall efficiency in various industrial processes.

Benefits

The benefits of this technology include faster gas evacuation, increased productivity, and improved performance of substrate support assemblies.

Potential Commercial Applications

Potential commercial applications of this technology include semiconductor manufacturing equipment, vacuum systems, and other industrial processes requiring efficient gas evacuation.

Possible Prior Art

One possible prior art could be the use of different types of plugs or valves in substrate support assemblies to control gas flow and evacuation processes.

How does this technology compare to existing gas evacuation methods in terms of efficiency and effectiveness?

This article does not provide a direct comparison between this technology and existing gas evacuation methods. Further research or testing may be needed to determine the advantages of this innovation over current practices.

What are the potential limitations or drawbacks of implementing this technology in substrate support assemblies?

The article does not address any potential limitations or drawbacks of implementing this technology. It would be important to consider factors such as cost, maintenance requirements, and compatibility with existing systems when evaluating the feasibility of adoption.

Original Abstract Submitted

The disclosure relates to a substrate support assembly for reducing the evacuation time when using argon gas. In one embodiment, a substrate support assembly includes a porous plug within the substrate support assembly. The porous plug includes a first cylindrical section with a first volume and axial length, a second cylindrical section with a second volume and axial length. The first cylindrical section has a larger volume than the second cylindrical section. The first cylindrical section and second cylindrical section have a volume ratio between about 2 and about 12. The first cylindrical section axial length and second cylindrical section axial length have a length ratio between about 2 and about 10.