18347817. LASER CRYSTALLIZATION MONITORING DEVICE AND METHOD OF LASER CRYSTALLIZATION MONITORING USING THE SAME simplified abstract (Samsung Display Co., Ltd.)

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LASER CRYSTALLIZATION MONITORING DEVICE AND METHOD OF LASER CRYSTALLIZATION MONITORING USING THE SAME

Organization Name

Samsung Display Co., Ltd.

Inventor(s)

JI-HWAN Kim of Yongin-si (KR)

LASER CRYSTALLIZATION MONITORING DEVICE AND METHOD OF LASER CRYSTALLIZATION MONITORING USING THE SAME - A simplified explanation of the abstract

This abstract first appeared for US patent application 18347817 titled 'LASER CRYSTALLIZATION MONITORING DEVICE AND METHOD OF LASER CRYSTALLIZATION MONITORING USING THE SAME

Simplified Explanation

The patent application describes a laser crystallization monitoring device that includes a stage for supporting a substrate, a laser beam generator, a mirror, telecentric f-theta lenses, and a monitor for inspecting the laser beam passing through the lenses.

  • Stage for supporting substrate
  • Laser beam generator emitting laser beam
  • Mirror rotating around rotation axis to reflect laser beam
  • First telecentric f-theta lens on laser beam path
  • Second telecentric f-theta lens for reflected laser beam
  • Monitor for inspecting laser beam

Potential Applications

The technology can be used in the manufacturing of electronic devices, such as displays, sensors, and solar cells, where precise crystallization of materials is required.

Problems Solved

The device helps in monitoring and controlling the crystallization process of materials using a laser beam, ensuring accuracy and efficiency in the manufacturing process.

Benefits

- Improved quality and uniformity of crystallized materials - Real-time monitoring and control of the crystallization process - Increased productivity and efficiency in manufacturing processes

Potential Commercial Applications

Optimizing Laser Crystallization Monitoring Device for Enhanced Manufacturing Processes

Possible Prior Art

Prior art may include similar devices used in the semiconductor industry for laser crystallization processes.

Unanswered Questions

How does the device handle variations in substrate materials and thicknesses?

The patent application does not provide details on how the device adjusts for different substrate materials and thicknesses to ensure accurate monitoring and control of the crystallization process.

What is the maximum size of substrates that can be accommodated by the device?

The patent application does not specify the maximum size of substrates that can be supported and monitored by the device, which could impact its scalability and versatility in different manufacturing settings.


Original Abstract Submitted

A laser crystallization monitoring device includes a stage that supports a substrate, a laser beam generator that emits a laser beam to the substrate, a mirror that reflects the laser beam emitted from the laser beam generator and that rotates around a rotation axis, a first telecentric f-theta lens located on the laser beam path between the mirror and the substrate, a second telecentric f-theta lens through which the laser beam reflected from the substrate passes, and a monitor that inspects the laser beam passing through the second telecentric f-theta lens.