18339314. EVALUATION APPARATUS, INFORMATION PROCESSING APPARATUS, COMPUTER-READABLE STORAGE MEDIUM, FILM FORMING SYSTEM, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)

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EVALUATION APPARATUS, INFORMATION PROCESSING APPARATUS, COMPUTER-READABLE STORAGE MEDIUM, FILM FORMING SYSTEM, AND ARTICLE MANUFACTURING METHOD

Organization Name

CANON KABUSHIKI KAISHA

Inventor(s)

SATORU Jimbo of Tokyo (JP)

EVALUATION APPARATUS, INFORMATION PROCESSING APPARATUS, COMPUTER-READABLE STORAGE MEDIUM, FILM FORMING SYSTEM, AND ARTICLE MANUFACTURING METHOD - A simplified explanation of the abstract

This abstract first appeared for US patent application 18339314 titled 'EVALUATION APPARATUS, INFORMATION PROCESSING APPARATUS, COMPUTER-READABLE STORAGE MEDIUM, FILM FORMING SYSTEM, AND ARTICLE MANUFACTURING METHOD

Simplified Explanation

The patent application describes an evaluation apparatus that can analyze images of a film forming region to identify abnormalities. The apparatus includes an obtaining unit to capture images of the evaluation region and a processor to process the images using a learned model. The processor can output information about any abnormalities detected in the image based on the learned model. The learned model takes into account both the image and design information of the film forming region.

  • Obtaining unit captures images of a film forming region
  • Processor analyzes the images using a learned model
  • Output includes information about abnormalities in the image
  • Learned model considers both image and design information

Potential Applications

  • Quality control in film manufacturing processes
  • Defect detection in film forming regions
  • Automated evaluation of film formation

Problems Solved

  • Manual inspection of film forming regions is time-consuming and prone to errors
  • Difficulty in identifying abnormalities in film formation
  • Lack of efficient and accurate evaluation methods for film forming processes

Benefits

  • Faster and more accurate evaluation of film forming regions
  • Reduction in manual inspection efforts and associated costs
  • Improved quality control in film manufacturing processes


Original Abstract Submitted

An evaluation apparatus includes an obtaining unit configured to obtain an image of an evaluation region including a film forming region on which a film is formed by a film forming process, and a processor configured to process the image for the evaluation. The processor is configured to output a feature concerning an abnormality in the image in accordance with a learned model. The image and design information representing a geometrical feature of the film forming region are input to the learned model.