18338789. EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
Contents
- 1 EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Potential Commercial Applications
- 1.9 Possible Prior Art
- 1.9.1 Unanswered Questions
- 1.9.2 How does this technology compare to existing extreme ultraviolet light sources in terms of efficiency and cost-effectiveness?
- 1.9.3 What are the environmental implications of using this technology, particularly in terms of waste gas emissions and resource consumption?
- 1.10 Original Abstract Submitted
EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE
Organization Name
Inventor(s)
EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE - A simplified explanation of the abstract
This abstract first appeared for US patent application 18338789 titled 'EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE
Simplified Explanation
The abstract describes an extreme ultraviolet light source device that includes a chamber with various components such as a condensing mirror, droplet supply, light source, and exhaust ports.
- The device includes a chamber with a condensing mirror on the lower surface, an intermediate focus, and exhaust ports on the upper surface.
- A droplet supply is located adjacent to the chamber to supply droplets for generating extreme ultraviolet light.
- A light source generates extreme ultraviolet light by oscillating a laser.
- A catch is positioned opposite to the droplet supply to receive discharged droplets.
- Exhaust systems are connected to the exhaust ports for removing waste gases from the chamber.
Potential Applications
This technology could be used in semiconductor manufacturing, lithography, and other industries requiring extreme ultraviolet light sources.
Problems Solved
This device solves the problem of efficiently generating extreme ultraviolet light for various industrial applications.
Benefits
The benefits of this technology include improved efficiency, precision, and reliability in generating extreme ultraviolet light.
Potential Commercial Applications
The potential commercial applications of this technology include semiconductor fabrication, advanced imaging systems, and scientific research equipment.
Possible Prior Art
One possible prior art for extreme ultraviolet light sources is the use of synchrotron radiation facilities for generating such light for scientific research purposes.
Unanswered Questions
How does this technology compare to existing extreme ultraviolet light sources in terms of efficiency and cost-effectiveness?
This article does not provide a direct comparison between this technology and existing extreme ultraviolet light sources in terms of efficiency and cost-effectiveness. Further research and analysis would be needed to determine the advantages and disadvantages of this device compared to others on the market.
What are the environmental implications of using this technology, particularly in terms of waste gas emissions and resource consumption?
The article does not address the environmental implications of using this technology, such as waste gas emissions and resource consumption. A comprehensive life cycle assessment would be necessary to evaluate the environmental impact of implementing this device in industrial settings.
Original Abstract Submitted
An extreme ultraviolet light source device includes a chamber having a lower surface on which a condensing mirror is arranged, an intermediate focus, and a side surface between the lower surface and an upper surface a first exhaust port and a second exhaust port on the upper surface and spaced apart from the intermediate focus; a droplet supply adjacent to the side surface of the chamber, and configured to supply a droplet to generate the extreme ultraviolet light into the chamber; a light source configured to generate the extreme ultraviolet light by oscillating a laser; a catch adjacent to the side surface of the chamber, opposite to the droplet supply, and configured to receive the droplet discharged from the droplet supply unit; a first exhaust connected to the first exhaust port; and a second exhaust adjacent to the upper surface of the chamber, and connected to the second exhaust port.
