18328955. RECIPE PROPOSAL DEVICE AND RECIPE PROPOSAL METHOD simplified abstract (Panasonic Intellectual Property Management Co., Ltd.)
RECIPE PROPOSAL DEVICE AND RECIPE PROPOSAL METHOD
Organization Name
Panasonic Intellectual Property Management Co., Ltd.
Inventor(s)
Hiroshi Shirouzu of SHIGA (JP)
RECIPE PROPOSAL DEVICE AND RECIPE PROPOSAL METHOD - A simplified explanation of the abstract
This abstract first appeared for US patent application 18328955 titled 'RECIPE PROPOSAL DEVICE AND RECIPE PROPOSAL METHOD
Simplified Explanation
The patent application describes a device that proposes a process recipe for a substrate processing apparatus based on target information regarding the desired shape of the substrate. It also calculates predicted information about the shape of the substrate after processing and displays both the target and predicted information.
- The device is used for proposing a process recipe for a substrate processing apparatus.
- It takes input regarding the desired shape of the substrate to be processed.
- Based on the target information, it proposes a process recipe to achieve the desired shape.
- The device also calculates predicted information about the shape of the substrate after processing.
- It displays both the target information and the prediction information.
Potential Applications
This technology can be applied in various industries where substrate processing is involved, such as semiconductor manufacturing, display panel production, and optical lens fabrication. It can be used to optimize the process recipe and ensure the desired shape of the substrate is achieved accurately.
Problems Solved
1. In substrate processing, it can be challenging to determine the appropriate process recipe to achieve a specific target shape. 2. Without a reliable prediction of the final shape, it is difficult to assess the success of the process and make necessary adjustments.
Benefits
1. The device provides a systematic approach to propose a process recipe based on target information, improving the efficiency and accuracy of substrate processing. 2. The calculation of predicted information allows for better evaluation of the process and enables adjustments if needed, reducing waste and improving overall quality.
Original Abstract Submitted
Disclosed is a recipe proposal device including: an input section for inputting a target information regarding a target shape of a substrate to be processed in a substrate processing apparatus; a recipe proposal section that proposes a process recipe used in the substrate processing apparatus in order to form the target shape, based on the target information; a calculation section that calculates a prediction information regarding a predicted shape when the substrate is processed in the substrate processing apparatus using the process recipe; and a display section that displays the target information and the prediction information.
