18305708. SELF-ALIGNED CONTACT LANDING ON A METAL CIRCUIT simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)

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SELF-ALIGNED CONTACT LANDING ON A METAL CIRCUIT

Organization Name

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

Inventor(s)

Ming-Hsun Lin of Hsinchu City (TW)

SELF-ALIGNED CONTACT LANDING ON A METAL CIRCUIT - A simplified explanation of the abstract

This abstract first appeared for US patent application 18305708 titled 'SELF-ALIGNED CONTACT LANDING ON A METAL CIRCUIT

Simplified Explanation

The abstract describes an integrated circuit device with landing circuitry, including a stair-shaped profile that extends into a silicon substrate. The landing circuitry consists of electrode layers interspersed with dielectric material and spacer structures on the ends of the electrode layers.

  • Integrated circuit device with landing circuitry
  • Stair-shaped profile extending into silicon substrate
  • Electrode layers interspersed with dielectric material
  • Spacer structures on ends of electrode layers

Potential Applications

The technology described in this patent application could be applied in the following areas:

  • Semiconductor manufacturing
  • Memory devices
  • Integrated circuits

Problems Solved

The technology addresses the following issues:

  • Efficient use of space in integrated circuits
  • Improved performance of memory devices
  • Enhanced reliability of semiconductor devices

Benefits

The benefits of this technology include:

  • Increased integration density
  • Enhanced performance
  • Improved reliability

Potential Commercial Applications

The technology could have commercial applications in:

  • Semiconductor industry
  • Electronics manufacturing
  • Memory chip production

Possible Prior Art

One possible prior art for this technology could be the use of spacer structures in semiconductor devices to improve performance and reliability.

Unanswered Questions

How does this technology compare to existing landing circuitry designs in terms of performance and efficiency?

The article does not provide a direct comparison with existing landing circuitry designs to evaluate performance and efficiency.

What are the specific manufacturing processes involved in creating the stair-shaped profile and spacer structures in the integrated circuit device?

The article does not detail the specific manufacturing processes used to create the stair-shaped profile and spacer structures in the integrated circuit device.


Original Abstract Submitted

Some implementations described herein include an integrated circuit device including landing circuitry and methods of formation. The landing circuitry, which may be part of a trench capacitor region, includes a stair-shaped profile that extends into a silicon substrate of the integrated circuit device. The landing circuitry includes electrode layers of the trench capacitor region interspersed with layers of a dielectric material. The landing circuitry further includes spacer structures on ends of the electrode layers along the stair-shaped profile.