18235609. SUBSTRATE PROCESSING DEVICE AND METHOD OF CONTROLLING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
SUBSTRATE PROCESSING DEVICE AND METHOD OF CONTROLLING THE SAME
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SUBSTRATE PROCESSING DEVICE AND METHOD OF CONTROLLING THE SAME - A simplified explanation of the abstract
This abstract first appeared for US patent application 18235609 titled 'SUBSTRATE PROCESSING DEVICE AND METHOD OF CONTROLLING THE SAME
Simplified Explanation
The patent application describes a method of controlling a substrate processing device by aligning a door opener with a door, detaching the door from the substrate carrier, exposing the entrance of the substrate carrier, and removing substrates from the carrier.
- Align door opener with front side of door
- Couple door opener to door
- Detach door from substrate carrier
- Lower door opener to expose entrance of substrate carrier
- Remove substrates from carrier
- Align door opener with entrance of substrate carrier
- Lower door opener in a perpendicular direction
- Remove another substrate from the carrier
Potential Applications
- Semiconductor manufacturing
- LCD panel production
- Solar panel manufacturing
Problems Solved
- Efficient substrate handling
- Improved access to substrates in carrier
- Streamlined substrate processing workflow
Benefits
- Increased productivity
- Reduced downtime
- Enhanced substrate handling accuracy
Original Abstract Submitted
A method of controlling a substrate processing device includes aligning a door opener with a front side of a door, wherein the door has closed an entrance of a substrate carrier, coupling the door opener to the door, detaching the door from the substrate carrier after the coupling of the door opener to the door, lowering the door opener coupled to the door and exposing the entrance of the substrate carrier, taking out one of a plurality of substrates from the substrate carrier, aligning the door opener coupled to the door to be adjacent to a front side of the entrance of the substrate carrier, the door coupled with the door opener being inclined at an inclination angle with respect to the entrance, lowering the door opener coupled to the door in a second direction perpendicular to the first direction, and taking another substrate out of the substrate carrier.
