18231339. YTTRIUM COMPOUND, SOURCE MATERIAL FOR FORMING YTTRIUM-CONTAINING FILM, AND METHOD OF MANUFACTURING INTEGRATED CIRCUIT DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)
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Contents
- 1 YTTRIUM COMPOUND, SOURCE MATERIAL FOR FORMING YTTRIUM-CONTAINING FILM, AND METHOD OF MANUFACTURING INTEGRATED CIRCUIT DEVICE USING THE SAME
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 YTTRIUM COMPOUND, SOURCE MATERIAL FOR FORMING YTTRIUM-CONTAINING FILM, AND METHOD OF MANUFACTURING INTEGRATED CIRCUIT DEVICE USING THE SAME - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Original Abstract Submitted
YTTRIUM COMPOUND, SOURCE MATERIAL FOR FORMING YTTRIUM-CONTAINING FILM, AND METHOD OF MANUFACTURING INTEGRATED CIRCUIT DEVICE USING THE SAME
Organization Name
Inventor(s)
Younjoung Cho of Suwon-si (KR)
Atsushi Yamashita of Tokyo (KR)
YTTRIUM COMPOUND, SOURCE MATERIAL FOR FORMING YTTRIUM-CONTAINING FILM, AND METHOD OF MANUFACTURING INTEGRATED CIRCUIT DEVICE USING THE SAME - A simplified explanation of the abstract
This abstract first appeared for US patent application 18231339 titled 'YTTRIUM COMPOUND, SOURCE MATERIAL FOR FORMING YTTRIUM-CONTAINING FILM, AND METHOD OF MANUFACTURING INTEGRATED CIRCUIT DEVICE USING THE SAME
Simplified Explanation
The abstract describes a yttrium compound, a method of manufacturing an integrated circuit device, and a raw material for forming an yttrium-containing film.
- Yttrium compound represented by General formula (1) is disclosed.
- Method for manufacturing an integrated circuit device is provided.
- Raw material for forming an yttrium-containing film is described.
Potential Applications
- Semiconductor industry for manufacturing integrated circuit devices.
- Electronics industry for forming yttrium-containing films in various electronic components.
Problems Solved
- Providing a novel yttrium compound for use in manufacturing processes.
- Offering a method for forming yttrium-containing films in electronic devices.
Benefits
- Improved performance and efficiency of integrated circuit devices.
- Enhanced properties of electronic components with yttrium-containing films.
Original Abstract Submitted
An yttrium compound, a method of manufacturing an integrated circuit device, and a raw material for forming an yttrium-containing film, the yttrium compound being represented by the following General formula (1):
