18188314. Crystallization of High-K Dielectric Layer simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
Contents
Crystallization of High-K Dielectric Layer
Organization Name
Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor(s)
Chien-Chang Chen of New Taipei City (TW)
Crystallization of High-K Dielectric Layer - A simplified explanation of the abstract
This abstract first appeared for US patent application 18188314 titled 'Crystallization of High-K Dielectric Layer
Simplified Explanation
The present disclosure describes a semiconductor device with a crystalline high-k dielectric layer. The semiconductor structure includes a fin structure on a substrate, a gate dielectric layer on the fin structure, and a gate structure on the gate dielectric layer. A top portion of the gate dielectric layer is crystalline and includes a crystalline high-k dielectric material.
- Explanation of the patent/innovation:
* Semiconductor device with a crystalline high-k dielectric layer * Includes a fin structure, gate dielectric layer, and gate structure * Top portion of gate dielectric layer is crystalline with high-k dielectric material
- Potential Applications:**
The technology can be applied in the development of advanced semiconductor devices, such as high-performance transistors and integrated circuits.
- Problems Solved:**
1. Improved performance and efficiency of semiconductor devices. 2. Enhanced reliability and stability of the gate dielectric layer.
- Benefits:**
1. Increased speed and functionality of electronic devices. 2. Reduction in power consumption and heat generation. 3. Longer lifespan and durability of semiconductor components.
- Potential Commercial Applications of this Technology:**
Optimizing semiconductor manufacturing processes for increased efficiency and performance.
- Possible Prior Art:**
Prior art may include patents related to high-k dielectric materials in semiconductor devices or advancements in gate dielectric layers.
- Unanswered Questions:
- How does the crystalline high-k dielectric layer impact the overall performance of the semiconductor device?
- Unanswered Questions:
The article does not delve into specific details regarding the direct influence of the crystalline high-k dielectric layer on the device's performance metrics.
- Are there any limitations or challenges associated with implementing a crystalline high-k dielectric layer in semiconductor devices?
The article does not address any potential drawbacks or obstacles that may arise when integrating a crystalline high-k dielectric layer into semiconductor structures.
Original Abstract Submitted
The present disclosure describes a semiconductor device having a crystalline high-k dielectric layer. The semiconductor structure includes a fin structure on a substrate, a gate dielectric layer on the fin structure, and a gate structure on the gate dielectric layer. A top portion of the gate dielectric layer is crystalline and includes a crystalline high-k dielectric material.