18128574. MASKLESS EXPOSURE DEVICE AND DISPLAY DEVICE simplified abstract (SAMSUNG DISPLAY CO., LTD.)

MASKLESS EXPOSURE DEVICE AND DISPLAY DEVICE

Organization Name

SAMSUNG DISPLAY CO., LTD.

Inventor(s)

Sang Hyun Yun of Yongin-si (KR)

Kab Jong Seo of Yongin-si (KR)

MASKLESS EXPOSURE DEVICE AND DISPLAY DEVICE - A simplified explanation of the abstract

This abstract first appeared for US patent application 18128574 titled 'MASKLESS EXPOSURE DEVICE AND DISPLAY DEVICE

Simplified Explanation

The abstract describes a maskless exposure device that includes a light source, a light modulator, an optical system, a position determining unit, and a control unit.

• The light source emits a beam.
• The light modulator modulates the beam according to an exposure pattern.
• The optical system transfers the modulated beam onto a substrate in the form of a beam spot array.
• The position determining unit generates relative position data between the beam spot array and the substrate.
• The control unit controls the light modulator based on the position data.

Potential applications of this technology:

• Semiconductor manufacturing: This device can be used in the production of semiconductor devices, where precise exposure patterns are required.
• Display manufacturing: It can be utilized in the production of displays, such as LCD or OLED screens, where accurate beam modulation is necessary.
• 3D printing: The device can be employed in 3D printing processes that require precise beam positioning and modulation.

Problems solved by this technology:

• Maskless exposure: This device eliminates the need for physical masks, allowing for more flexibility and cost-effectiveness in the exposure process.
• Precise beam modulation: The light modulator enables accurate modulation of the beam, ensuring high-quality and precise exposure patterns.
• Position determination: The position determining unit provides relative position data, allowing for precise alignment of the beam spot array with the substrate.

Benefits of this technology:

• Cost-effectiveness: The elimination of physical masks reduces production costs.
• Flexibility: The device allows for easy modification of exposure patterns without the need for new masks.
• High precision: The precise beam modulation and position determination result in accurate and high-quality exposures.

Original Abstract Submitted

A maskless exposure device includes: a light source for emitting a beam, a light modulator for modulating the beam according to an exposure pattern, an optical system for transferring the modulated beam onto a substrate in the form of a beam spot array, a position determining unit for generating relative position data between the beam spot array and the substrate, and a control unit for controlling the light modulator based on the position data of the position determining unit.