18062080. MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)

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MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD

Organization Name

CANON KABUSHIKI KAISHA

Inventor(s)

SATORU Jimbo of Tochigi (JP)

KAZUHIKO Mishima of Tochigi (JP)

MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD - A simplified explanation of the abstract

This abstract first appeared for US patent application 18062080 titled 'MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD

Simplified Explanation

The patent application describes a measurement apparatus that can measure the position information of a measurement target. Here are the key points:

  • The apparatus includes a scope that captures an image of the measurement target and generates an image.
  • A processor is used to obtain the position information of the measurement target based on the captured image.
  • The processor utilizes a statistical technique to generate multiple image components from multiple images captured by the scope.
  • These generated image components are outputted and processed further.
  • The position information is determined based on the result of the processing.

Potential applications of this technology:

  • Industrial manufacturing: This measurement apparatus can be used in manufacturing processes to accurately measure the position of components or objects.
  • Robotics: The apparatus can be integrated into robotic systems to provide precise position information for navigation and manipulation tasks.
  • Medical imaging: The technology can be applied in medical imaging devices to measure the position of anatomical structures or guide surgical procedures.

Problems solved by this technology:

  • Accurate position measurement: The apparatus provides a reliable and precise method for measuring the position of a measurement target.
  • Efficiency: By utilizing a statistical technique and processing multiple image components, the apparatus can improve the efficiency of position determination.

Benefits of this technology:

  • Improved accuracy: The measurement apparatus offers a more accurate method for determining the position information of a measurement target.
  • Time-saving: The statistical technique and processing of multiple image components allow for faster position determination, increasing overall efficiency.
  • Versatility: The apparatus can be applied in various fields and industries, providing a flexible solution for position measurement needs.


Original Abstract Submitted

A measurement apparatus that measures position information of a measurement target is provided. The apparatus includes a scope configured to generate an image by capturing an image of the measurement target, and a processor configured to obtain position information of the measurement target based on the image. The processor is configured to generate a plurality of image components using a statistical technique from a plurality of images generated by the scope, output the plurality of generated image components, perform processing based on the plurality of image components, and determine the position information based on a result of the processing.

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