18055959. ACETAL-BASED COMPOUND, ACETAL-BASED PREPOLYMER, ACETAL-BASED POLYMER, AND PHOTORESIST COMPOSITION COMPRISING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

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ACETAL-BASED COMPOUND, ACETAL-BASED PREPOLYMER, ACETAL-BASED POLYMER, AND PHOTORESIST COMPOSITION COMPRISING THE SAME

Organization Name

SAMSUNG ELECTRONICS CO., LTD.

Inventor(s)

Chanjae Ahn of Suwon-si (KR)

Myungwoong Kim of Incheon (KR)

Yoonhyun Kwak of Suwon-si (KR)

Sol An of Incheon (KR)

ACETAL-BASED COMPOUND, ACETAL-BASED PREPOLYMER, ACETAL-BASED POLYMER, AND PHOTORESIST COMPOSITION COMPRISING THE SAME - A simplified explanation of the abstract

This abstract first appeared for US patent application 18055959 titled 'ACETAL-BASED COMPOUND, ACETAL-BASED PREPOLYMER, ACETAL-BASED POLYMER, AND PHOTORESIST COMPOSITION COMPRISING THE SAME

Simplified Explanation

The abstract of the patent application describes an acetal-based compound, prepolymer, polymer, and a photoresist composition that includes these compounds.

  • The patent application is related to a specific acetal-based compound represented by Formula 1.
  • The application also covers an acetal-based prepolymer and polymer.
  • Additionally, the patent application includes a photoresist composition that incorporates the acetal-based compound, prepolymer, or polymer.
  • The invention is focused on the development of these acetal-based compounds and their applications in photoresist compositions.

Potential Applications

The potential applications of this technology include:

  • Photoresist materials for use in semiconductor manufacturing.
  • Advanced lithography techniques in the production of microchips.
  • High-resolution patterning in the fabrication of electronic devices.

Problems Solved

This technology addresses the following problems:

  • The need for improved photoresist materials with enhanced performance and resolution capabilities.
  • The demand for more efficient and precise lithography techniques in semiconductor manufacturing.
  • The challenge of achieving high-resolution patterning in the production of electronic devices.

Benefits

The benefits of this technology are:

  • Improved performance and resolution in photoresist materials.
  • Enhanced lithography techniques leading to higher quality microchips.
  • Increased precision and efficiency in the fabrication of electronic devices.


Original Abstract Submitted

An acetal-based compound represented by Formula 1, an acetal-based prepolymer, an acetal-based polymer, and a photoresist composition including the same