17969909. IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)

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IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

Organization Name

CANON KABUSHIKI KAISHA

Inventor(s)

Naoki Maruyama of Tochigi (JP)

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD - A simplified explanation of the abstract

This abstract first appeared for US patent application 17969909 titled 'IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

Simplified Explanation

The abstract describes an imprint apparatus that is used for bringing a mold and an imprint material on a substrate surface into contact with each other. The apparatus includes a controller that performs various steps to ensure proper contact and alignment between the mold and the substrate.

  • Contacting step: The mold holding unit and the substrate holding unit are moved using driving units to bring the mold and the imprint material into contact with each other.
  • Obtaining step: After the contacting step, the substrate driving unit obtains a driving force in a first direction parallel to the substrate surface for the substrate holding unit.
  • Tilt correcting step: Based on the magnitude of the driving force obtained in the obtaining step, the mold holding unit is rotated about a second direction perpendicular to the first direction in the substrate surface using the mold driving unit.

Potential applications of this technology:

  • Microfabrication: The imprint apparatus can be used for creating microstructures on substrates, such as in the production of microchips or microfluidic devices.
  • Nanotechnology: The apparatus can be utilized for nanoscale patterning and imprinting, enabling the creation of intricate nanostructures with high precision.

Problems solved by this technology:

  • Alignment and contact: The apparatus ensures proper alignment and contact between the mold and the substrate, which is crucial for achieving accurate and high-quality imprints.
  • Tilt correction: The tilt correcting step addresses any misalignment or tilting of the mold holding unit, ensuring that the imprint is performed correctly and uniformly across the substrate surface.

Benefits of this technology:

  • Improved accuracy: The apparatus allows for precise alignment and contact between the mold and the substrate, resulting in highly accurate imprints.
  • Enhanced efficiency: By automating the contacting and tilt correcting steps, the apparatus streamlines the imprinting process, reducing the time and effort required.
  • Versatility: The technology can be applied to various substrates and materials, making it adaptable to different industries and applications.


Original Abstract Submitted

An imprint apparatus according to the present invention includes a controller configured to perform a contacting step of moving at least one of a mold holding unit and a substrate holding unit by at least one of a mold driving unit and a substrate driving unit such that a mold and an imprint material on a substrate surface are brought into contact with each other, an obtaining step of obtaining a driving force in a first direction parallel to the substrate surface for the substrate holding unit by the substrate driving unit after performing the contacting step, and a tilt correcting step of rotating the mold holding unit about a second direction perpendicular to the first direction in the substrate surface by the mold driving unit based on a magnitude of the driving force obtained in the obtaining step.

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