17961645. MASK ASSEMBLY AND METHOD OF REPAIRING THE SAME simplified abstract (Samsung Display Co., Ltd.)
Contents
MASK ASSEMBLY AND METHOD OF REPAIRING THE SAME
Organization Name
Inventor(s)
YOUNGMIN Moon of Yongin-si (KR)
SEUNGYONG Song of Suwon-si (KR)
KYU HWAN Hwang of Seongnam-si (KR)
MASK ASSEMBLY AND METHOD OF REPAIRING THE SAME - A simplified explanation of the abstract
This abstract first appeared for US patent application 17961645 titled 'MASK ASSEMBLY AND METHOD OF REPAIRING THE SAME
Simplified Explanation
The patent application describes a method for repairing a mask assembly used in various industries such as semiconductor manufacturing.
- The mask assembly consists of a frame, an open mask with a first opening on the frame's upper surface, and a first unit mask with multiple deposition openings that overlap the first opening.
- The method involves cutting the open mask outside the first unit mask to create a larger second opening.
- A second unit mask with deposition openings corresponding to the first unit mask is then connected to the cut open mask.
Potential applications of this technology:
- Semiconductor manufacturing: The method can be used to repair mask assemblies used in the fabrication of semiconductor devices.
- Display manufacturing: The technology can be applied to repair mask assemblies used in the production of displays, such as LCD or OLED screens.
- Photolithography: The method can be used to repair mask assemblies used in the process of transferring patterns onto substrates in various industries.
Problems solved by this technology:
- Mask damage: The method provides a solution for repairing mask assemblies that have been damaged, ensuring their continued usability.
- Cost-effective repair: By repairing the mask assembly instead of replacing it entirely, the method offers a more cost-effective solution for companies.
Benefits of this technology:
- Simplified repair process: The method offers a straightforward process for repairing mask assemblies, reducing complexity and time required for repairs.
- Enhanced usability: By repairing the mask assembly, the technology ensures that it can continue to be used, avoiding the need for new mask production.
- Cost savings: Repairing the mask assembly instead of purchasing a new one can result in significant cost savings for companies.
Original Abstract Submitted
A repairing method of a mask assembly includes providing a mask assembly including a frame, an open mask including a first opening disposed on an upper surface of the frame, and a first unit mask including a plurality of first deposition openings to overlap the first opening in a plan view and disposed on an upper surface of the open mask, first cutting the open mask at an outside of the first unit mask such that a second opening having a size greater than a size of the first opening is defined, and connecting the second unit mask including a plurality of second deposition openings corresponding to the plurality of first deposition openings to the first cut open mask.