17961553. HALOGEN-RESISTANT THERMAL BARRIER COATING FOR PROCESSING CHAMBERS simplified abstract (Applied Materials, Inc.)
Contents
- 1 HALOGEN-RESISTANT THERMAL BARRIER COATING FOR PROCESSING CHAMBERS
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 HALOGEN-RESISTANT THERMAL BARRIER COATING FOR PROCESSING CHAMBERS - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Potential Commercial Applications
- 1.9 Possible Prior Art
- 1.10 Unanswered Questions
- 1.11 Original Abstract Submitted
HALOGEN-RESISTANT THERMAL BARRIER COATING FOR PROCESSING CHAMBERS
Organization Name
Inventor(s)
Amir H. Tavakoli of San Jose CA (US)
Ala Moradian of Sunnyvale CA (US)
Tetsuya Ishikawa of San Jose CA (US)
HALOGEN-RESISTANT THERMAL BARRIER COATING FOR PROCESSING CHAMBERS - A simplified explanation of the abstract
This abstract first appeared for US patent application 17961553 titled 'HALOGEN-RESISTANT THERMAL BARRIER COATING FOR PROCESSING CHAMBERS
Simplified Explanation
The patent application describes a coating for a processing chamber component that includes a metallic bond layer, a thermal barrier layer, and a ceramic sealing layer resistant to halogen-containing chemicals.
- Metallic bond layer deposited on component surface
- Thermal barrier layer deposited on bond layer
- Non-porous ceramic sealing layer deposited on thermal barrier layer
- Sealing layer conforms to surface irregularities
- Sealing layer resistant to halogen-containing chemicals
Potential Applications
The technology could be applied in semiconductor manufacturing, chemical processing, and other industries where components are exposed to harsh chemical environments.
Problems Solved
The coating provides protection against corrosion and chemical attack, extending the lifespan of processing chamber components and reducing maintenance costs.
Benefits
- Increased component durability - Enhanced resistance to halogen-containing chemicals - Improved performance in harsh environments
Potential Commercial Applications
"Chemical-Resistant Coating for Processing Chamber Components"
Possible Prior Art
There may be existing coatings for processing chamber components, but the specific combination of layers and resistance to halogen-containing chemicals may be novel.
Unanswered Questions
How does the coating impact the thermal properties of the component?
The article does not provide information on whether the coating affects the thermal conductivity of the component.
What is the expected lifespan of components with this coating compared to traditional coatings?
The article does not mention any data or studies on the longevity of components with this new coating compared to conventional coatings.
Original Abstract Submitted
A coating on a processing chamber component includes a metallic bond layer deposited on a surface of the component. A thermal barrier layer is deposited on the bond layer. A substantially non-porous ceramic sealing layer is deposited on the thermal barrier layer. The sealing layer substantially conforms to irregularities of the surface of the thermal barrier layer. A chemistry of the sealing layer is selected for resistance to attack from halogen-containing chemicals.
