17950012. GROUNDING DEVICES FOR SUBSTRATE PROCESSING CHAMBERS simplified abstract (Applied Materials, Inc.)
Contents
- 1 GROUNDING DEVICES FOR SUBSTRATE PROCESSING CHAMBERS
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 GROUNDING DEVICES FOR SUBSTRATE PROCESSING CHAMBERS - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Potential Commercial Applications
- 1.9 Possible Prior Art
- 1.9.1 Unanswered Questions
- 1.9.2 How does the high aluminum content in the outer layer affect the overall flexibility of the grounding strap?
- 1.9.3 Are there any specific manufacturing processes or techniques mentioned in the patent application to ensure the outer layer consists of at least 99% aluminum?
- 1.10 Original Abstract Submitted
GROUNDING DEVICES FOR SUBSTRATE PROCESSING CHAMBERS
Organization Name
Inventor(s)
Aki Hosokawa of Sunnyvale CA (US)
Teng Mao Wang of Tainan City (TW)
GROUNDING DEVICES FOR SUBSTRATE PROCESSING CHAMBERS - A simplified explanation of the abstract
This abstract first appeared for US patent application 17950012 titled 'GROUNDING DEVICES FOR SUBSTRATE PROCESSING CHAMBERS
Simplified Explanation
The grounding strap for a process chamber described in the patent application consists of a core layer and an outer layer made of at least 99% aluminum.
- The grounding strap includes a core layer.
- The grounding strap has an outer layer made of at least 99% aluminum.
Potential Applications
The technology could be applied in various industries such as semiconductor manufacturing, electronics production, and other fields where grounding straps are required for process chambers.
Problems Solved
1. Improved conductivity: The high aluminum content in the outer layer enhances the grounding strap's conductivity, ensuring efficient grounding in process chambers. 2. Corrosion resistance: Aluminum is known for its corrosion resistance, which can prolong the lifespan of the grounding strap in harsh environments.
Benefits
1. Enhanced performance: The high aluminum content improves the grounding strap's performance in maintaining proper grounding in process chambers. 2. Longevity: The corrosion-resistant properties of aluminum contribute to the longevity of the grounding strap, reducing the need for frequent replacements.
Potential Commercial Applications
"Aluminum Grounding Strap for Process Chambers: Enhancing Grounding Efficiency in Industrial Settings"
Possible Prior Art
There may be existing grounding straps for process chambers made of different materials or with varying compositions. However, specific prior art information is not provided in the abstract.
Unanswered Questions
How does the high aluminum content in the outer layer affect the overall flexibility of the grounding strap?
The abstract does not mention how the aluminum content impacts the flexibility of the grounding strap. It would be interesting to know if the high aluminum content makes the strap more rigid or if it retains flexibility for easy installation and maintenance.
Are there any specific manufacturing processes or techniques mentioned in the patent application to ensure the outer layer consists of at least 99% aluminum?
The abstract does not delve into the manufacturing processes involved in achieving the high aluminum content in the outer layer. Understanding the techniques used could provide insights into the feasibility and scalability of producing such grounding straps.
Original Abstract Submitted
A grounding strap for a process chamber includes a core layer. The grounding strap further includes an outer layer. The outer layer includes at least 99% aluminum.
