17940308. INSPECTION SYSTEM INCLUDING SIDE ILLUMINATION UNIT AND INSPECTION METHOD USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
INSPECTION SYSTEM INCLUDING SIDE ILLUMINATION UNIT AND INSPECTION METHOD USING THE SAME
Organization Name
Inventor(s)
Yunsong Jeong of Yongin-si (KR)
Sangyong Yu of Hwaseong-si (KR)
INSPECTION SYSTEM INCLUDING SIDE ILLUMINATION UNIT AND INSPECTION METHOD USING THE SAME - A simplified explanation of the abstract
This abstract first appeared for US patent application 17940308 titled 'INSPECTION SYSTEM INCLUDING SIDE ILLUMINATION UNIT AND INSPECTION METHOD USING THE SAME
Simplified Explanation
The patent application describes an inspection system that is used to inspect blank masks used in manufacturing processes. The system includes a stage unit where the blank mask is loaded.
- The system includes a side illumination unit that is positioned to face a side surface of the blank mask. The side illumination unit consists of multiple LEDs.
- A camera is placed adjacent to the blank mask to capture images for inspection purposes.
- The side illumination unit emits a light beam that is directed towards the side surface of the blank mask. This light beam is parallel to the upper surface of the blank mask.
Potential applications of this technology:
- Manufacturing industry: The inspection system can be used in the manufacturing of various products that require the use of masks, such as semiconductors, printed circuit boards, or optical devices.
- Quality control: The system can help ensure the quality and accuracy of the blank masks used in manufacturing processes, leading to improved product performance and reliability.
Problems solved by this technology:
- Accurate inspection: The system provides a way to inspect the side surface of the blank mask, which is not easily accessible using traditional inspection methods.
- Parallel illumination: The use of parallel light beams ensures consistent and uniform illumination of the side surface, enabling accurate inspection and detection of defects.
Benefits of this technology:
- Improved efficiency: The system allows for faster and more efficient inspection of blank masks, reducing production time and costs.
- Enhanced accuracy: By inspecting the side surface of the blank mask, the system can detect defects that may not be visible from the top surface, ensuring higher quality products.
- Non-destructive inspection: The system does not damage or alter the blank mask during the inspection process, preserving its integrity for further manufacturing steps.
Original Abstract Submitted
An inspection system includes a stage unit configured to load a blank mask thereon. A side illumination unit, which is disposed to face a side surface of the blank mask and includes a plurality of LEDs, is provided. A camera disposed adjacent to the blank mask is provided. An inspection light beam irradiated from the side illumination unit toward the side surface of the blank mask is substantially parallel to an upper surface of the blank mask.
