17933861. SELF-ALIGNED BACKSIDE CONTACT WITH DEEP TRENCH LAST FLOW simplified abstract (International Business Machines Corporation)

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SELF-ALIGNED BACKSIDE CONTACT WITH DEEP TRENCH LAST FLOW

Organization Name

International Business Machines Corporation

Inventor(s)

Tao Li of Slingerlands NY (US)

Ruilong Xie of Niskayuna NY (US)

Kisik Choi of Watervliet NY (US)

Brent A. Anderson of Jericho VT (US)

SELF-ALIGNED BACKSIDE CONTACT WITH DEEP TRENCH LAST FLOW - A simplified explanation of the abstract

This abstract first appeared for US patent application 17933861 titled 'SELF-ALIGNED BACKSIDE CONTACT WITH DEEP TRENCH LAST FLOW

Simplified Explanation

The semiconductor device described in the abstract includes multiple layers and components for improved performance and functionality.

  • The device features first and second source/drain (S/D) epitaxy layers, a gate contact, and a back end of the line (BEOL) layer connected to the first S/D epitaxy and gate contact on the top side of the device.
  • Additionally, there is a wafer carrying the BEOL layer on the top side, a backside trench epitaxy formed through and contacting portions of the second S/D epitaxy, and a backside power distribution network electrically coupled to the backside trench epitaxy on the bottom of the device.

Potential Applications

This technology could be applied in:

  • Advanced semiconductor devices
  • High-performance electronics
  • Power distribution systems

Problems Solved

This innovation addresses challenges related to:

  • Enhancing device performance
  • Improving power distribution efficiency
  • Increasing integration capabilities

Benefits

The benefits of this technology include:

  • Enhanced device functionality
  • Improved power management
  • Increased overall performance

Potential Commercial Applications

This technology could be valuable in industries such as:

  • Semiconductor manufacturing
  • Electronics production
  • Power distribution systems

Possible Prior Art

One potential prior art for this technology could be the use of multiple epitaxy layers in semiconductor devices for improved performance and functionality.

Unanswered Questions

How does this technology compare to existing semiconductor devices in terms of power efficiency?

This article does not provide a direct comparison between this technology and existing semiconductor devices in terms of power efficiency. Further research or testing may be needed to determine the specific advantages in this aspect.

What are the potential limitations or drawbacks of implementing this technology in practical applications?

The article does not address any potential limitations or drawbacks of implementing this technology in practical applications. Additional studies or real-world testing may be necessary to identify any challenges that could arise.


Original Abstract Submitted

A semiconductor device includes first source/drain (S/D) epitaxy and a second S/D epitaxy and a gate contact. The device also includes a back end of the line (BEOL) layer connected electrically connected to the first S/D epitaxy and the gate contact on a top side of the device and a wafer that carries the BEOL layer and is on the top side of the device. The device also includes a backside trench epitaxy formed through and contacting portions of the second S/D epitaxy and a backside power distribution network electrically coupled to the backside trench epitaxy and disposed on the bottom of the device.