17933187. SELF-ALIGNED BACKSIDE CONTACT MODULE FOR 3DIC APPLICATION simplified abstract (QUALCOMM Incorporated)

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SELF-ALIGNED BACKSIDE CONTACT MODULE FOR 3DIC APPLICATION

Organization Name

QUALCOMM Incorporated

Inventor(s)

Qingqing Liang of San Diego CA (US)

Periannan Chidambaram of San Diego CA (US)

George Pete Imthurn of San Diego CA (US)

Stanley Seungchul Song of San Diego CA (US)

SELF-ALIGNED BACKSIDE CONTACT MODULE FOR 3DIC APPLICATION - A simplified explanation of the abstract

This abstract first appeared for US patent application 17933187 titled 'SELF-ALIGNED BACKSIDE CONTACT MODULE FOR 3DIC APPLICATION

Simplified Explanation

The patent application describes integrated circuit structures with through-substrate vias (TSVs) processed through self-aligned contact modules, resulting in smaller and denser TSVs with low mechanical stress. The denser TSVs allow for more flexible wiring options.

  • Through-substrate vias (TSVs) are processed through self-aligned contact modules.
  • Smaller and denser TSVs are formed with low mechanical stress.
  • Denser TSVs allow for more flexible wiring options.

Potential Applications

The technology can be applied in:

  • Semiconductor manufacturing
  • Microelectronics industry

Problems Solved

This technology addresses:

  • Limitations in TSV density and size
  • Mechanical stress in TSV structures

Benefits

The benefits of this technology include:

  • Smaller and denser TSVs
  • Lower mechanical stress
  • More flexible wiring options

Potential Commercial Applications

The technology can be utilized in:

  • High-performance computing
  • Telecommunications industry

Possible Prior Art

One possible prior art could be:

  • Existing methods for TSV processing in integrated circuits

Unanswered Questions

How does this technology impact overall circuit performance?

The article does not delve into the specific performance improvements or changes that this technology may bring to integrated circuits.

Are there any limitations to the size or density of TSVs that can be achieved with this method?

The article does not mention any potential limitations or constraints in achieving smaller or denser TSVs using this technology.


Original Abstract Submitted

Disclosed are integrated circuit structures with through-substrate vias (TSVs) processed through self-aligned contact modules. As a result, much smaller and/or denser TSVs are formed with low mechanical stress. The denser TSVs allow for more flexible wiring options.