17894625. LOADING APPARATUS FOR DEPOSITION MASK simplified abstract (Samsung Display Co., Ltd.)

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LOADING APPARATUS FOR DEPOSITION MASK

Organization Name

Samsung Display Co., Ltd.

Inventor(s)

Kyongho Hong of Hwaseong-si (KR)

Myungkyu Kim of Cheonan-si (KR)

Chang-Kon Park of Cheonan-si (KR)

Sukbeom You of Anyang-si (KR)

Dongjae Lee of Cheonan-si (KR)

LOADING APPARATUS FOR DEPOSITION MASK - A simplified explanation of the abstract

This abstract first appeared for US patent application 17894625 titled 'LOADING APPARATUS FOR DEPOSITION MASK

Simplified Explanation

The abstract describes a loading apparatus for a deposition mask, which includes a clamper, a first adsorption part, a second adsorption part, and a connection part. It also includes a picker that transfers the mask. When the picker transfers the mask, the first adsorption part adsorbs the ends of the mask, the second adsorption part adsorbs a portion between the ends, and the clamper clamps the mask between the first and second adsorption parts.

  • Loading apparatus for a deposition mask
  • Includes a clamper, first adsorption part, second adsorption part, and connection part
  • Also includes a picker for transferring the mask
  • First adsorption part adsorbs the ends of the mask
  • Second adsorption part adsorbs a portion between the ends
  • Clamper clamps the mask between the first and second adsorption parts

Potential Applications

  • Semiconductor manufacturing
  • Thin film deposition processes
  • Microelectronics production

Problems Solved

  • Efficient and precise loading of deposition masks
  • Secure clamping of the mask during transfer
  • Minimizing damage or misalignment of the mask

Benefits

  • Improved productivity and efficiency in mask loading
  • Enhanced accuracy and precision in deposition processes
  • Reduced risk of mask damage or misalignment


Original Abstract Submitted

A loading apparatus for a deposition mask includes a clamper that clamps the mask extending in a direction, a first adsorption part, a second adsorption part, and a connection part connected to the first adsorption part and the second adsorption part, and includes a picker that transfers the mask. In case that the picker transfers the mask, the first adsorption part adsorbs ends of the mask, the second adsorption unit adsorbs a portion between the ends of the mask, and the clamper clamps the mask between the first adsorption part and the second adsorption part.