17877439. PLASMA GENERATOR, PLASMA PROCESSING DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE PLASMA PROCESSING DEVICE simplified abstract (Samsung Electronics Co., Ltd.)
Contents
- 1 PLASMA GENERATOR, PLASMA PROCESSING DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE PLASMA PROCESSING DEVICE
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 PLASMA GENERATOR, PLASMA PROCESSING DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE PLASMA PROCESSING DEVICE - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Original Abstract Submitted
PLASMA GENERATOR, PLASMA PROCESSING DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE PLASMA PROCESSING DEVICE
Organization Name
Inventor(s)
Youngdo Kim of Hwaseong-si (KR)
Sanghun Kim of Hwaseong-si (KR)
Sungyeol Kim of Yongin-si (KR)
Sangki Nam of Seongnam-si (KR)
Taemin Earmme of Hwaseong-si (KR)
Changyun Lee of Hwaseong-si (KR)
Seongmoon Ha of Yongin-si (KR)
PLASMA GENERATOR, PLASMA PROCESSING DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE PLASMA PROCESSING DEVICE - A simplified explanation of the abstract
This abstract first appeared for US patent application 17877439 titled 'PLASMA GENERATOR, PLASMA PROCESSING DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE PLASMA PROCESSING DEVICE
Simplified Explanation
The abstract describes a plasma generator that consists of several components including a dielectric tube, inner and outer helical coils, a variable capacitor, and a radio frequency power supply. The generator is designed to generate plasma by creating a stationary wave of magnetic field or electromagnetic wave in the dielectric tube. The RF power supply provides variable frequency power to the inner helical coil.
- The plasma generator includes a dielectric tube and helical coils to generate plasma.
- The inner helical coil forms a stationary wave of magnetic field or electromagnetic wave in the dielectric tube.
- A variable capacitor is used to configure a closed loop with the inner helical coil.
- The outer helical coil is magnetically coupled to the inner helical coil.
- The radio frequency power supply provides variable frequency power to the inner helical coil.
Potential Applications
- Plasma generators can be used in various industrial applications such as material processing, surface treatment, and chemical reactions.
- They can be utilized in research and development for studying plasma physics and its applications.
- Plasma generators can also be used in medical applications such as sterilization and wound healing.
Problems Solved
- The plasma generator solves the problem of efficiently generating plasma by utilizing a dielectric tube and helical coils.
- The variable capacitor and RF power supply allow for control over the frequency and power of the generated plasma.
- The magnetically coupled outer helical coil enhances the efficiency and effectiveness of the plasma generation process.
Benefits
- The plasma generator provides a reliable and efficient method for generating plasma.
- The variable frequency capability allows for flexibility in plasma generation for different applications.
- The magnetically coupled coils improve the overall performance and stability of the plasma generator.
Original Abstract Submitted
A plasma generator may include a dielectric tube, an inner helical coil surrounding the dielectric tube and configured to generate plasma by forming a stationary wave of at least one of a magnetic field and an electromagnetic wave in the dielectric tube, a variable capacitor configuring a closed loop with the inner helical coil, an outer helical coil surrounding the inner helical coil and magnetically coupled to the inner helical coil, and a radio frequency (RF) power supply configured to provide RF power at a variable frequency to the inner helical coil.
