17871075. MEMS DEVICE AND MANUFACTURING METHOD THEREOF simplified abstract (KIA CORPORATION)
Contents
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
Organization Name
Inventor(s)
Jang Hyeon Lee of Gunpo-si (KR)
Hyun Soo Kim of Yongin-si (KR)
MEMS DEVICE AND MANUFACTURING METHOD THEREOF - A simplified explanation of the abstract
This abstract first appeared for US patent application 17871075 titled 'MEMS DEVICE AND MANUFACTURING METHOD THEREOF
Simplified Explanation
The present disclosure describes a microelectromechanical systems (MEMS) device and a method for manufacturing it. The device aims to improve the uniformity of temperature distribution in a heater unit. The device includes a heater unit formed on a substrate and a dummy pattern unit formed in the remaining portion of the substrate, which is not electrically connected to the heater unit.
- The device is a microelectromechanical systems (MEMS) device.
- The device includes a heater unit formed on a substrate.
- The device also includes a dummy pattern unit formed in the remaining portion of the substrate.
- The dummy pattern unit is not electrically connected to the heater unit.
Potential applications of this technology:
- MEMS devices can be used in various fields such as consumer electronics, automotive, aerospace, and medical devices.
- This technology can be applied in devices that require precise temperature control, such as microfluidic systems, gas sensors, and thermal actuators.
- The improved temperature distribution can enhance the performance and reliability of MEMS devices.
Problems solved by this technology:
- Uneven temperature distribution in a heater unit can lead to inconsistent performance and reliability of MEMS devices.
- The present technology addresses this issue by providing a dummy pattern unit that helps improve the uniformity of temperature distribution.
Benefits of this technology:
- Improved uniformity of temperature distribution in the heater unit leads to more consistent and reliable performance of MEMS devices.
- The manufacturing method allows for efficient and cost-effective production of MEMS devices with improved temperature control.
- The technology can contribute to the advancement of various applications that rely on precise temperature control in MEMS devices.
Original Abstract Submitted
The present disclosure relates to a microelectromechanical systems (MEMS) device and method for manufacturing the same for improving the uniformity of temperature distribution in a heater unit, and the present disclosure discloses a MEMS device and method for manufacturing the same, including a heater unit that is formed on a substrate, and a dummy pattern unit that is formed in a remaining portion except for a portion where the heater unit is formed so as not to be electrically connected to the heater unit.
