17836199. OPTICAL ASSEMBLY FOR ALIGNMENT INSPECTION, OPTICAL APPARATUS INCLUDING THE SAME, DIE BONDING SYSTEM AND DIE BONDING METHOD USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

OPTICAL ASSEMBLY FOR ALIGNMENT INSPECTION, OPTICAL APPARATUS INCLUDING THE SAME, DIE BONDING SYSTEM AND DIE BONDING METHOD USING THE SAME

Organization Name

SAMSUNG ELECTRONICS CO., LTD.

Inventor(s)

Jiyoung Chu of Gyeongju-si (KR)

Hyungjin Kim of Suwon-si (KR)

Minhwan Seo of Hwaseong-si (KR)

Wondon Joo of Incheon (KR)

Sungmin Ahn of Suwon-si (KR)

Jiyoung Kim of Hwaseong-si (KR)

Ono Kazuya of Suwon-si (KR)

Jungchul Lee of Hwaseong-si (KR)

OPTICAL ASSEMBLY FOR ALIGNMENT INSPECTION, OPTICAL APPARATUS INCLUDING THE SAME, DIE BONDING SYSTEM AND DIE BONDING METHOD USING THE SAME - A simplified explanation of the abstract

This abstract first appeared for US patent application 17836199 titled 'OPTICAL ASSEMBLY FOR ALIGNMENT INSPECTION, OPTICAL APPARATUS INCLUDING THE SAME, DIE BONDING SYSTEM AND DIE BONDING METHOD USING THE SAME

Simplified Explanation

The patent application describes an optical apparatus that uses a folding mirror to direct and reflect illumination lights and reflected lights in different directions. It includes lenses, reflection portions, and a beam splitter prism to control the light paths.

• The optical apparatus uses a folding mirror to direct illumination lights onto alignment marks and reflect the reflected lights in different horizontal directions.
• Lenses are placed in the optical paths of the reflected lights to control their direction.
• Reflection portions are used to reflect the reflected lights passing through the lenses.
• A beam splitter prism divides the illumination light and directs it to the reflection portions, while transmitting the reflected lights.

Potential Applications

• Optical alignment systems in manufacturing processes.
• Laser scanning and imaging systems.
• Microscopy and inspection devices.

Problems Solved

• Efficiently directing and controlling the paths of illumination and reflected lights.
• Simplifying the optical setup by using a folding mirror and beam splitter prism.
• Enhancing accuracy and precision in alignment and imaging applications.

Benefits

• Improved efficiency and accuracy in optical systems.
• Compact and simplified design.
• Versatile applications in various industries.

Original Abstract Submitted

An optical apparatus includes a folding mirror configured to direct first and second illumination lights on first and second alignment marks respectively and reflect first and second reflected lights reflected from the first and second alignment marks in different horizontal directions respectively, first and second lenses arranged respectively in optical paths of the first and second reflected lights reflected from the first and second reflective surfaces of the folding mirror, first and second reflection portions configured to reflect the first and second reflected lights passing through the first and second lenses respectively, and a beam splitter prism configured to divide an illumination light incident through a first surface into the first and second illumination lights and direct to the first and second reflection portions, and transmit the first and second reflected lights reflected by the first and second reflection portions through a second surface.