17835107. MOLTEN LIQUID TRANSPORT FOR TUNABLE VAPORIZATION IN ION SOURCES simplified abstract (Applied Materials, Inc.)

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MOLTEN LIQUID TRANSPORT FOR TUNABLE VAPORIZATION IN ION SOURCES

Organization Name

Applied Materials, Inc.

Inventor(s)

Craig R. Chaney of Gloucester MA (US)

Graham Wright of Newburyport MA (US)

MOLTEN LIQUID TRANSPORT FOR TUNABLE VAPORIZATION IN ION SOURCES - A simplified explanation of the abstract

This abstract first appeared for US patent application 17835107 titled 'MOLTEN LIQUID TRANSPORT FOR TUNABLE VAPORIZATION IN ION SOURCES

Simplified Explanation

The abstract describes an ion source with a crucible that contains a solid dopant material. A porous wicking tip is placed in the crucible to control the flow rate of molten dopant material to the arc chamber.

  • The ion source includes a crucible with a solid dopant material.
  • A porous wicking tip is inserted into the crucible.
  • The wicking tip can be a tube with interior conduits, two concentric cylinders with rods in between, or one or more wound foil layers.
  • The wicking tip controls the flow rate of molten dopant material to the arc chamber.

Potential Applications

  • Ion implantation in semiconductor manufacturing.
  • Ion beam analysis in materials science.
  • Ion thrusters in spacecraft propulsion.

Problems Solved

  • Controlling the flow rate of molten dopant material in an ion source.
  • Ensuring consistent and precise delivery of dopant material to the arc chamber.

Benefits

  • Improved control over the ion source operation.
  • Enhanced precision and consistency in ion beam processes.
  • Increased efficiency and reliability in various applications.


Original Abstract Submitted

An ion source with a crucible is disclosed. In some embodiments, the crucible contains a solid dopant material, such as a metal. A porous wicking tip is disposed in the crucible in contact with the solid dopant material. The porous wicking tip may be a tube with one or more interior conduits. Alternatively, the porous tip may be two concentric cylinders with a plurality of rods disposed in the annular ring between the two cylinders. Alternatively, the porous tip may be one or more foil layers wound together. In each of these embodiments, the wicking tip can be used to control the flow rate of molten dopant material to the arc chamber.

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