17820911. METHOD OF TRAINING SEMICONDUCTOR PROCESS IMAGE GENERATOR simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

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METHOD OF TRAINING SEMICONDUCTOR PROCESS IMAGE GENERATOR

Organization Name

SAMSUNG ELECTRONICS CO., LTD.

Inventor(s)

Sangchul Yeo of Osan-si (KR)

Jaewon Yang of Suwon-si (KR)

Hyeok Lee of Suwon-si (KR)

Sooryong Lee of Seoul (KR)

METHOD OF TRAINING SEMICONDUCTOR PROCESS IMAGE GENERATOR - A simplified explanation of the abstract

This abstract first appeared for US patent application 17820911 titled 'METHOD OF TRAINING SEMICONDUCTOR PROCESS IMAGE GENERATOR

Simplified Explanation

The abstract describes a method for training a semiconductor process image generator using a combination of mask images and their transformed versions.

  • The method involves training the generator with a first group of mask images and a second group of mask images.
  • The generator is then trained with the second group of mask images and a first transformed group obtained by applying a transformation to the first group.
  • Finally, the generator is trained with the first group of mask images and a second transformed group obtained by applying a transformation to the second group.

Potential Applications:

  • This method can be used in the semiconductor industry for training image generators that simulate semiconductor processes.
  • It can be applied in the development and optimization of semiconductor manufacturing processes.
  • The generated images can be used for testing and validation of semiconductor process models and algorithms.

Problems Solved:

  • Traditional methods of training semiconductor process image generators may not capture the full range of variations in mask images.
  • This method addresses the limitation by incorporating transformed versions of the mask images, allowing for a more comprehensive training process.
  • It helps in improving the accuracy and reliability of the generated images for various semiconductor process simulations.

Benefits:

  • By training the generator with a combination of mask images and their transformed versions, the accuracy and diversity of the generated images can be enhanced.
  • The method provides a more comprehensive training process, capturing a wider range of variations in mask images.
  • The generated images can be used for various applications in the semiconductor industry, including process development, optimization, and testing.


Original Abstract Submitted

A method of training a semiconductor process image generator includes training the semiconductor process image generator with a plurality of mask images including a first group and a second group, training the semiconductor process image generator with the second group and a first transformed group obtained by applying a transformation to the first group, and training the semiconductor process image generator with the first group and a second transformed group obtained by applying a transformation to the second group.