17809122. Photonic Package and Method of Manufacture simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)

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Photonic Package and Method of Manufacture

Organization Name

Taiwan Semiconductor Manufacturing Company, Ltd.

Inventor(s)

Tsung-Fu Tsai of Changhua (TW)

Hsing-Kuo Hsia of Jhubei (TW)

Szu-Wei Lu of Hsinchu (TW)

Chen-Hua Yu of Hsinchu (TW)

Photonic Package and Method of Manufacture - A simplified explanation of the abstract

This abstract first appeared for US patent application 17809122 titled 'Photonic Package and Method of Manufacture

Simplified Explanation

The abstract describes a package that includes a laser diode and various layers and structures to facilitate its operation and connectivity.

  • The package includes a bonding layer that directly bonds to the laser diode.
  • A first dielectric layer is placed over the laser diode and is directly bonded to the bonding layer.
  • A first silicon nitride waveguide is embedded in the first dielectric layer and extends over the laser diode.
  • A second dielectric layer is placed over the first silicon nitride waveguide.
  • A silicon waveguide is embedded in the second dielectric layer.
  • An interconnect structure is placed over the silicon waveguide.
  • Conductive features are present to electrically contact the interconnect structure through the first and second dielectric layers.

Potential applications of this technology:

  • Optical communication systems
  • Laser-based medical devices
  • Optical sensing devices
  • Data storage systems

Problems solved by this technology:

  • Facilitates efficient and reliable electrical connectivity to the laser diode
  • Provides a compact and integrated package for laser diode operation
  • Ensures proper alignment and protection of the waveguides

Benefits of this technology:

  • Improved performance and reliability of laser diodes
  • Compact and integrated design for space-saving applications
  • Enhanced electrical connectivity for efficient operation
  • Protection and alignment of waveguides for optimal performance.


Original Abstract Submitted

A package includes a laser diode includes a bonding layer; a first dielectric layer over the laser diode, wherein the first dielectric layer is directly bonded to the bonding layer of the laser diode; a first silicon nitride waveguide in the first dielectric layer, wherein the first silicon nitride waveguide extends over the laser diode; a second dielectric layer over the first silicon nitride waveguide; a silicon waveguide in the second dielectric layer; an interconnect structure over the silicon waveguide; and conductive features extending through the first dielectric layer and the second dielectric layer to electrically contact the interconnect structure.