17724214. LOADLOCK APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
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LOADLOCK APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
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LOADLOCK APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME - A simplified explanation of the abstract
This abstract first appeared for US patent application 17724214 titled 'LOADLOCK APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
Simplified Explanation
The loadlock apparatus described in this patent application is designed to facilitate the transfer of objects between two different environments, such as a vacuum chamber and an atmospheric environment.
- The loadlock chamber has two openings, one at the top and one at the bottom, which are separated vertically.
- The first slit valve is located at the bottom opening and consists of a valve plate that can move between an open position and a closed position.
- The second slit valve is located at the top opening and also consists of a valve plate that can move between an open position and a closed position.
- When the first slit valve is in the open position, the bottom opening is accessible and objects can be transferred into or out of the loadlock chamber.
- When the second slit valve is in the open position, the top opening is accessible and objects can be transferred between the loadlock chamber and the external environment.
Potential applications of this technology:
- Semiconductor manufacturing: The loadlock apparatus can be used to transfer wafers or other components between a vacuum chamber and an atmospheric environment during the fabrication process.
- Material research: The apparatus can facilitate the transfer of samples between different environments for analysis or testing purposes.
- Pharmaceutical industry: The loadlock apparatus can be utilized to transfer sensitive drugs or chemicals between controlled environments.
Problems solved by this technology:
- Efficient transfer: The loadlock apparatus provides a reliable and efficient method for transferring objects between different environments without compromising the integrity of the environments.
- Contamination prevention: By using the slit valves to seal the openings, the apparatus minimizes the risk of contamination from the external environment.
- Vertical separation: The vertical separation of the openings allows for easy access to both the top and bottom of the loadlock chamber, enabling smooth transfer operations.
Benefits of this technology:
- Improved productivity: The loadlock apparatus streamlines the transfer process, reducing downtime and increasing overall productivity.
- Enhanced safety: The sealed openings and controlled environment minimize the risk of accidents or contamination.
- Versatility: The loadlock apparatus can be adapted for use in various industries and applications, making it a versatile solution.
Original Abstract Submitted
A loadlock apparatus includes a loadlock chamber including a first opening and a second opening separated in a vertical direction; a first slit valve including a first valve plate configured to move between a first open position where the first opening is open and a first closed position where the first opening is closed, the first open position being a position moved downward from the first closed position; and a second slit valve including a second valve plate configured to move between a second open position where the second opening is open and a second closed position where the second opening is closed, the second open position being a position moved upward from the second closed position.
