View source for 17722838. WAFER PROCESSING APPARATUS INCLUDING EFEM AND METHOD OF PROCESSING WAFER simplified abstract (Samsung Electronics Co., Ltd.)

=WAFER PROCESSING APPARATUS INCLUDING EFEM AND METHOD OF PROCESSING WAFER=


==Organization Name==

[[:Category:Samsung Electronics Co., Ltd.|Samsung Electronics Co., Ltd.]]


[[Category:Samsung Electronics Co., Ltd.]]

==Inventor(s)==

[[:Category:Jinhyuk Choi of Suwon-si (KR)|Jinhyuk Choi of Suwon-si (KR)]][[Category:Jinhyuk Choi of Suwon-si (KR)]]

[[:Category:Myungki Song of Hwaseong-si (KR)|Myungki Song of Hwaseong-si (KR)]][[Category:Myungki Song of Hwaseong-si (KR)]]

[[:Category:Kongwoo Lee of Seoul (KR)|Kongwoo Lee of Seoul (KR)]][[Category:Kongwoo Lee of Seoul (KR)]]

[[:Category:Kyusang Lee of Suwon-si (KR)|Kyusang Lee of Suwon-si (KR)]][[Category:Kyusang Lee of Suwon-si (KR)]]

[[:Category:Beomsoo Hwang of Seoul (KR)|Beomsoo Hwang of Seoul (KR)]][[Category:Beomsoo Hwang of Seoul (KR)]]

[[:Category:Keonwoo Kim of Yongin-si (KR)|Keonwoo Kim of Yongin-si (KR)]][[Category:Keonwoo Kim of Yongin-si (KR)]]

[[:Category:Jonghwi Seo of Suwon-si (KR)|Jonghwi Seo of Suwon-si (KR)]][[Category:Jonghwi Seo of Suwon-si (KR)]]

==WAFER PROCESSING APPARATUS INCLUDING EFEM AND METHOD OF PROCESSING WAFER - A simplified explanation of the abstract==


This abstract first appeared for US patent application 17722838 titled 'WAFER PROCESSING APPARATUS INCLUDING EFEM AND METHOD OF PROCESSING WAFER

==Simplified Explanation==

The abstract describes a wafer processing apparatus that includes multiple equipment front end modules (EFEMs), a wafer transfer chamber, a wafer processing chamber, and a wafer transfer arm. Each EFEM consists of an EFEM chamber, several load ports located on the side of the chamber, and a load lock that overlaps with at least one load port vertically.

* The wafer processing apparatus is designed to handle wafer processing in a semiconductor manufacturing environment.
* It includes multiple EFEMs, which are modules that facilitate the transfer of wafers between different chambers.
* Each EFEM has an EFEM chamber, load ports, and a load lock.
* The load ports are positioned on the side of the EFEM chamber, allowing for easy loading and unloading of wafers.
* The load lock overlaps with at least one load port vertically, ensuring a secure seal during the transfer process.
* The wafer transfer chamber and wafer processing chamber are also part of the apparatus, enabling the movement and processing of wafers.
* The wafer transfer arm is responsible for transferring wafers between the EFEMs, transfer chamber, and processing chamber.

==Potential Applications==
* Semiconductor manufacturing: The wafer processing apparatus can be used in semiconductor fabrication facilities to handle the processing of wafers.

==Problems Solved==
* Efficient wafer transfer: The apparatus solves the problem of efficiently transferring wafers between different chambers in a semiconductor manufacturing environment.
* Secure sealing: The load lock overlapping with the load ports ensures a secure seal during the transfer process, preventing contamination or damage to the wafers.

==Benefits==
* Improved productivity: The apparatus allows for efficient and seamless transfer of wafers, reducing downtime and increasing overall productivity.
* Enhanced wafer protection: The secure sealing provided by the load lock prevents contamination or damage to the wafers during the transfer process.


==Original Abstract Submitted==

A wafer processing apparatus may include a plurality of equipment front end modules (EFEMs), a wafer transfer chamber, a wafer processing chamber, and a wafer transfer arm. Each of the plurality of EFEMs may include an EFEM chamber, a plurality of load ports provided at a side of the EFEM chamber, and a load lock provided at a side of the EFEM chamber to overlap with at least one of the plurality of load ports in a vertical direction.



[[Category:H01L21/67]]
[[Category:H01L21/687]]
[[Category:H01L21/677]]