17722764. LIGHT DETECTION AND RANGING (LiDAR)-BASED INSPECTION DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract (Samsung Electronics Co., Ltd.)
LIGHT DETECTION AND RANGING (LiDAR)-BASED INSPECTION DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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LIGHT DETECTION AND RANGING (LiDAR)-BASED INSPECTION DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE - A simplified explanation of the abstract
This abstract first appeared for US patent application 17722764 titled 'LIGHT DETECTION AND RANGING (LiDAR)-BASED INSPECTION DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Simplified Explanation
The patent application describes a LiDAR-based inspection device that uses ultrafast pulses to detect and analyze objects. Here are the key points:
- The device uses an ultrafast pulse source to generate two ultrafast pulses with pulse widths ranging from 1 fs to 100 fs.
- A stage adjusts the distance of flight of the first ultrafast pulse to generate a gating signal.
- A dispersing device generates a chirp signal based on the second ultrafast pulse reflected from a specimen. The chirp signal consists of pulses with different wavelengths.
- A nonlinear optical generator combines the chirp signal and the gating signal to generate a nonlinear optical signal.
- A detector is used to detect the nonlinear optical signal.
- The gating signal overlaps with some of the pulses in the chirp signal in the nonlinear optical generator.
Potential applications of this technology:
- Inspection and analysis of objects in various industries such as manufacturing, aerospace, and automotive.
- Detection of defects or abnormalities in materials or structures.
- Non-destructive testing of objects for quality control purposes.
Problems solved by this technology:
- Provides a more efficient and accurate method for inspecting and analyzing objects.
- Allows for the detection of small defects or abnormalities that may not be visible to the naked eye.
- Enables non-destructive testing, reducing the need for costly and time-consuming physical inspections.
Benefits of this technology:
- Faster and more precise inspection and analysis of objects.
- Improved detection capabilities for small defects or abnormalities.
- Non-destructive testing reduces costs and saves time.
- Can be used in a wide range of industries for various applications.
Original Abstract Submitted
Provided is a light detection and ranging (LiDAR)-based inspection device including an ultrafast pulse source configured to generate a first ultrafast pulse and a second ultrafast pulse each having a pulse width ranging from 1 fs to 100 fs, a stage configured to generate a gating signal by adjusting a distance of flight of the first ultrafast pulse, a dispersing device configured to generate a chirp signal, based on the second ultrafast pulse reflected from a specimen, the chirp signal including a plurality of pulses having different wavelengths, a nonlinear optical generator configured to generate a nonlinear optical signal based on the chirp signal and the gating signal, and a detector configured to detect the nonlinear optical signal, wherein the gating signal temporally overlaps with some of the plurality of pulses included in the chirp signal in the nonlinear optical generator.
