17718423. VIBRATION ISOLATION TABLE FOR SEMICONDUCTOR EQUIPMENT AND VIBRATION ISOLATION TABLE SYSTEM INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

From WikiPatents
Jump to navigation Jump to search

VIBRATION ISOLATION TABLE FOR SEMICONDUCTOR EQUIPMENT AND VIBRATION ISOLATION TABLE SYSTEM INCLUDING THE SAME

Organization Name

Samsung Electronics Co., Ltd.

Inventor(s)

Hyunchul Kim of Suwon-si (KR)

Souk Kim of Seoul (KR)

Younghoon Sohn of Seoul (KR)

VIBRATION ISOLATION TABLE FOR SEMICONDUCTOR EQUIPMENT AND VIBRATION ISOLATION TABLE SYSTEM INCLUDING THE SAME - A simplified explanation of the abstract

This abstract first appeared for US patent application 17718423 titled 'VIBRATION ISOLATION TABLE FOR SEMICONDUCTOR EQUIPMENT AND VIBRATION ISOLATION TABLE SYSTEM INCLUDING THE SAME

Simplified Explanation

The abstract describes a vibration isolation table that consists of a lower structure, a middle structure, and an upper structure. The lower structure is made up of multiple block structures with spaces between them, and either the lower or upper structure includes high attenuation concrete.

  • The vibration isolation table is designed to reduce vibrations and isolate sensitive equipment from external disturbances.
  • The lower structure is composed of several block structures that are spaced apart, creating gaps between them.
  • The middle structure is positioned on top of the lower structure, and the upper structure is placed on top of the middle structure.
  • The lower or upper structure incorporates high attenuation concrete, which helps to absorb and dampen vibrations.
  • The use of high attenuation concrete enhances the vibration isolation capabilities of the table, providing better protection for delicate equipment.

Potential Applications

This technology can be applied in various industries and scenarios where vibration isolation is crucial, such as:

  • Scientific research laboratories
  • Manufacturing facilities
  • Semiconductor manufacturing
  • Precision measurement and testing environments
  • Medical and healthcare facilities

Problems Solved

The vibration isolation table addresses the following problems:

  • External vibrations can negatively impact the performance and accuracy of sensitive equipment.
  • Vibrations can cause disturbances, leading to errors or damage in precision instruments.
  • Certain industries require a stable and vibration-free environment for optimal operation.

Benefits

The use of this vibration isolation table offers several benefits:

  • Improved accuracy and precision of sensitive equipment by minimizing external vibrations.
  • Protection against potential damage or errors caused by disturbances.
  • Enhanced stability and reliability in environments where vibration control is essential.
  • Versatile application across various industries and settings.


Original Abstract Submitted

A vibration isolation table of the disclosure may include a lower structure including a plurality of block structures, a middle structure on the lower structure, and an upper structure on the middle structure. The plurality of block structures may be spaced apart from one another such that a space is formed between adjacent ones of the plurality of block structures. At least one of the lower structure and the upper structure may include high attenuation concrete.