17711261. EQUIPMENT FRONT END MODULE AND DESTRUCTIVE ANALYSIS AUTOMATION APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

EQUIPMENT FRONT END MODULE AND DESTRUCTIVE ANALYSIS AUTOMATION APPARATUS INCLUDING THE SAME

Organization Name

Samsung Electronics Co., Ltd.

Inventor(s)

Youn Gon Oh of Hwaseong-si (KR)

Sae Yun Ko of Hwaseong-si (KR)

Gil Ho Gu of Hwaseong-si (KR)

Dong Su Kim of Incheon (KR)

Ji Hun Kim of Uiwang-si (KR)

Sang Hyuk Park of Yongin-si (KR)

Eun Hee Lee of Hwaseong-si (KR)

Ho Chan Lee of Seoul (KR)

Seong Sil Jeong of Incheon (KR)

Seong Pyo Hong of Hwaseong-si (KR)

EQUIPMENT FRONT END MODULE AND DESTRUCTIVE ANALYSIS AUTOMATION APPARATUS INCLUDING THE SAME - A simplified explanation of the abstract

This abstract first appeared for US patent application 17711261 titled 'EQUIPMENT FRONT END MODULE AND DESTRUCTIVE ANALYSIS AUTOMATION APPARATUS INCLUDING THE SAME

Simplified Explanation

The patent application describes an equipment front end module (EFEM) that includes a base, a tray port, a working robot, and a shuttle port. The EFEM is designed to communicate with a processor and perform tasks related to loading and conveying trays.

• The EFEM includes a base that can communicate with a processor.
• The tray port on the base is used to load a tray, which contains a stub and a grid holder.
• The working robot is configured to move on the base, grasp the stub and grid holder in the tray, and convey them.
• The shuttle port on the base has two grooves, one for fixing the stub and another for fixing the grid holder.
• The working robot is further configured to convey the stub to the first groove and the grid holder to the second groove in the shuttle port.

Potential Applications

• Semiconductor manufacturing: The EFEM can be used in semiconductor manufacturing processes to handle trays containing stubs and grid holders.
• Electronics assembly: The EFEM can be utilized in electronics assembly processes to load and convey trays with stubs and grid holders.

Problems Solved

• Automation: The EFEM automates the process of loading and conveying trays, reducing the need for manual labor.
• Efficiency: The working robot and shuttle port enable efficient handling of stubs and grid holders, improving overall process efficiency.

Benefits

• Increased productivity: The EFEM speeds up the loading and conveying process, leading to higher productivity.
• Accuracy: The working robot ensures precise handling of stubs and grid holders, minimizing errors.
• Cost savings: By automating the process, the EFEM reduces the need for manual labor, resulting in cost savings for companies.

Original Abstract Submitted

Provided is an equipment front end module (EFEM) including a base configured to communicate with a processor, a tray port on the base, the tray port being configured to load a tray including a stub and a grid holder, a working robot configured to move in a direction on the base, and grasp and convey the stub in the tray and the grid holder in the tray, and a shuttle port on the base, the shuttle port including a first groove configured to fix the stub, and a second groove configured to fix the grid holder, wherein the working robot is further configured to convey the stub to the first groove and convey the grid holder to the second groove.