17694011. SEMICONDUCTOR DEVICE simplified abstract (Samsung Electronics Co., Ltd.)

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SEMICONDUCTOR DEVICE

Organization Name

Samsung Electronics Co., Ltd.

Inventor(s)

Doyoung Choi of Hwaseong-si (KR)

Daewon Ha of Seoul (KR)

Kyungho Kim of Suwon-si (KR)

Mingyu Kim of Hwaseong-si (KR)

Kyuman Hwang of Seoul (KR)

SEMICONDUCTOR DEVICE - A simplified explanation of the abstract

This abstract first appeared for US patent application 17694011 titled 'SEMICONDUCTOR DEVICE

Simplified Explanation

The patent application describes a semiconductor device that includes different thicknesses of gate dielectric layers and semiconductor patterns in different regions of the device.

  • The device includes a substrate with two regions, each containing active patterns, source/drain patterns, and channel patterns.
  • The first region has a thicker gate dielectric layer and a thinner semiconductor pattern compared to the second region.
  • The second region has a thinner gate dielectric layer and a thicker semiconductor pattern compared to the first region.
  • The device also includes gate electrodes on the channel patterns and interface layers between the channel patterns and gate electrodes.

Potential applications of this technology:

  • Semiconductor manufacturing industry
  • Electronics industry
  • Integrated circuit design and fabrication

Problems solved by this technology:

  • Allows for the optimization of gate dielectric layer thickness and semiconductor pattern thickness in different regions of a semiconductor device.
  • Provides flexibility in designing and fabricating semiconductor devices with varying performance requirements.

Benefits of this technology:

  • Improved performance and efficiency of semiconductor devices.
  • Enhanced control over the electrical properties of different regions within a semiconductor device.
  • Increased flexibility in designing and fabricating complex integrated circuits.


Original Abstract Submitted

A semiconductor device includes: a substrate including first and second regions, first and second active patterns in the first and second regions, respectively; first source/drain patterns and a first channel pattern including first semiconductor patterns; second source/drain patterns and a second channel pattern including second semiconductor patterns; first and second gate electrodes on the first and second channel patterns, respectively; and a first gate dielectric layer and a second gate dielectric layer. The first gate dielectric layer includes a first interface layer between the first channel pattern and the first gate electrode, and a first high-k dielectric layer. The second gate dielectric layer includes a second interface layer and a second high-k dielectric layer between the second channel pattern and the second gate electrode. A thickness of the first high-k dielectric layer is greater than that of the second high-k dielectric layer. A thickness of the first semiconductor pattern is less than that of the second semiconductor pattern