17692561. METHODS FOR DRY PRINTING CARBON NANOTUBE MEMBRANES simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)
METHODS FOR DRY PRINTING CARBON NANOTUBE MEMBRANES
Organization Name
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Inventor(s)
METHODS FOR DRY PRINTING CARBON NANOTUBE MEMBRANES - A simplified explanation of the abstract
This abstract first appeared for US patent application 17692561 titled 'METHODS FOR DRY PRINTING CARBON NANOTUBE MEMBRANES
Simplified Explanation
Methods for preparing a nanotube membrane for use in a pellicle membrane using dry printing are disclosed. Nanotube fibers are produced in a reaction vessel and dry sprayed onto a filter to form the nanotube membrane. The thickness of the nanotube membrane can be controlled by moving the reaction vessel and the filter relative to each other, or by further processing to reduce the thickness of the layer deposited onto the filter. This method reduces the number of process steps, reducing overall production time, and can also be used to produce larger membranes. The pellicle membrane can be formed with multiple layers and has a combination of high transmittance, low deflection, and small pore size. A conformal coating may applied to an outer surface of the pellicle membrane to protect the pellicle membrane from damage that can occur due to heat and hydrogen plasma created during EUV exposure.
- Nanotube fibers are produced in a reaction vessel and dry sprayed onto a filter to form a nanotube membrane.
- The thickness of the nanotube membrane can be controlled by adjusting the relative positions of the reaction vessel and the filter or by further processing.
- This method reduces the number of process steps and overall production time.
- It allows for the production of larger membranes.
- The pellicle membrane can have multiple layers and offers high transmittance, low deflection, and small pore size.
- A conformal coating can be applied to protect the pellicle membrane from damage during EUV exposure.
Potential Applications
- Manufacturing of pellicle membranes for use in extreme ultraviolet (EUV) lithography.
- Protection of photomasks used in semiconductor manufacturing.
Problems Solved
- Reduces the number of process steps and overall production time.
- Enables the production of larger membranes.
- Provides a pellicle membrane with high transmittance, low deflection, and small pore size.
- Protects the pellicle membrane from damage during EUV exposure.
Benefits
- Increased efficiency in the manufacturing process.
- Improved performance and durability of pellicle membranes.
- Enhanced protection for photomasks used in semiconductor manufacturing.
Original Abstract Submitted
Methods for preparing a nanotube membrane for use in a pellicle membrane using dry printing are disclosed. Nanotube fibers are produced in a reaction vessel and dry sprayed onto a filter to form the nanotube membrane. The thickness of the nanotube membrane can be controlled by moving the reaction vessel and the filter relative to each other, or by further processing to reduce the thickness of the layer deposited onto the filter. This method reduces the number of process steps, reducing overall production time, and can also be used to produce larger membranes. The pellicle membrane can be formed with multiple layers and has a combination of high transmittance, low deflection, and small pore size. A conformal coating may applied to an outer surface of the pellicle membrane to protect the pellicle membrane from damage that can occur due to heat and hydrogen plasma created during EUV exposure.
