US Patent Application 18230062. METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE simplified abstract
Contents
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
Organization Name
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Inventor(s)
Ming-Hui Weng of New Taipei City (TW)
Chen-Yu Liu of Kaohsiung City (TW)
Chih-Cheng Liu of Hsinchu (TW)
Jr-Hung Li of Chupei City (TW)
Chi-Ming Yang of Hsinchu City (TW)
Ching-Yu Chang of Yilang County (TW)
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE - A simplified explanation of the abstract
This abstract first appeared for US patent application 18230062 titled 'METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
Simplified Explanation
The patent application describes a method of manufacturing a semiconductor device using a photoresist layer.
- The photoresist layer is formed by combining two precursors in a vapor state and depositing the resulting material onto a substrate.
- A protective layer is then applied over the photoresist layer.
- The photoresist layer is selectively exposed to actinic radiation through the protective layer, creating a latent pattern.
- The protective layer is removed, and a developer is applied to the selectively exposed photoresist layer to develop the latent pattern and form a pattern on the substrate.
Original Abstract Submitted
A method of manufacturing a semiconductor device includes forming a photoresist layer over a substrate, including combining a first precursor and a second precursor in a vapor state to form a photoresist material, and depositing the photoresist material over the substrate. A protective layer is formed over the photoresist layer. The photoresist layer is selectively exposed to actinic radiation through the protective layer to form a latent pattern in the photoresist layer. The protective layer is removed, and the latent pattern is developed by applying a developer to the selectively exposed photoresist layer to form a pattern.
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Ming-Hui Weng of New Taipei City (TW)
- Chen-Yu Liu of Kaohsiung City (TW)
- Chih-Cheng Liu of Hsinchu (TW)
- Yi-Chen Kuo of Taichung (TW)
- Jia-Lin Wei of Hsinchu (TW)
- Yen-Yu Chen of Taipei (TW)
- Jr-Hung Li of Chupei City (TW)
- Yahru Cheng of Taipei (TW)
- Chi-Ming Yang of Hsinchu City (TW)
- Tze-Liang Lee of Hsinchu (TW)
- Ching-Yu Chang of Yilang County (TW)
- G03F7/004
- H01L21/033
- G03F7/00