View source for 17945910. ON-BOARD CLEANING OF TOOLING PARTS IN HYBRID BONDING TOOL simplified abstract (Applied Materials, Inc.)

=ON-BOARD CLEANING OF TOOLING PARTS IN HYBRID BONDING TOOL=


==Organization Name==

[[:Category:Applied Materials, Inc.|Applied Materials, Inc.]]


[[Category:Applied Materials, Inc.]]

==Inventor(s)==

[[:Category:Ruiping Wang of San Jose CA (US)|Ruiping Wang of San Jose CA (US)]][[Category:Ruiping Wang of San Jose CA (US)]]

[[:Category:Ying Wang of Singapore (SG)|Ying Wang of Singapore (SG)]][[Category:Ying Wang of Singapore (SG)]]

[[:Category:Guan Huei See of Singapore (SG)|Guan Huei See of Singapore (SG)]][[Category:Guan Huei See of Singapore (SG)]]

[[:Category:Ananthkrishna Jupudi of Singapore (SG)|Ananthkrishna Jupudi of Singapore (SG)]][[Category:Ananthkrishna Jupudi of Singapore (SG)]]

[[:Category:Praveen Kumar Choragudi of Singapore (SG)|Praveen Kumar Choragudi of Singapore (SG)]][[Category:Praveen Kumar Choragudi of Singapore (SG)]]

==ON-BOARD CLEANING OF TOOLING PARTS IN HYBRID BONDING TOOL - A simplified explanation of the abstract==


This abstract first appeared for US patent application 17945910 titled 'ON-BOARD CLEANING OF TOOLING PARTS IN HYBRID BONDING TOOL

==Simplified Explanation==

Methods and apparatus for cleaning tooling parts in a substrate processing tool are provided herein. In some embodiments, a method of cleaning tooling parts in a substrate processing tool includes placing one or more dirty tools on a holder in a bonding chamber of a multi-chamber processing tool; transferring the holder from the bonding chamber to a cleaning chamber of the multi-chamber processing tool; cleaning the one or more dirty tools in the cleaning chamber to produce one or more cleaned tools; inspecting the one or more cleaned tools in an inspection chamber of the multi-chamber processing tool; and transferring the one or more cleaned tools to the bonding chamber.

* Placing dirty tools on a holder in a bonding chamber
* Transferring the holder to a cleaning chamber
* Cleaning the dirty tools to produce cleaned tools
* Inspecting the cleaned tools in an inspection chamber
* Transferring the cleaned tools back to the bonding chamber

== Potential Applications ==
The technology can be applied in semiconductor manufacturing, where clean tooling parts are essential for processing substrates effectively.

== Problems Solved ==
This technology solves the problem of efficiently cleaning tooling parts in a substrate processing tool, ensuring optimal performance and preventing contamination of substrates.

== Benefits ==
The benefits of this technology include improved substrate processing efficiency, reduced risk of contamination, and increased tooling lifespan.

== Potential Commercial Applications ==
Potential commercial applications of this technology include semiconductor fabrication facilities, research institutions, and companies involved in substrate processing.

== Possible Prior Art ==
One possible prior art could be the use of manual cleaning processes for tooling parts in substrate processing tools, which may be time-consuming and less effective compared to automated cleaning methods.

=== Unanswered Questions ===

=== How does this technology compare to existing cleaning methods in terms of efficiency and effectiveness? ===
This article does not provide a direct comparison between this technology and existing cleaning methods. 

=== What are the potential cost implications of implementing this technology in a substrate processing tool? ===
The article does not address the potential cost implications of implementing this technology.


==Original Abstract Submitted==

Methods and apparatus for cleaning tooling parts in a substrate processing tool are provided herein. In some embodiments, a method of cleaning tooling parts in a substrate processing tool includes placing one or more dirty tools on a holder in a bonding chamber of a multi-chamber processing tool; transferring the holder from the bonding chamber to a cleaning chamber of the multi-chamber processing tool; cleaning the one or more dirty tools in the cleaning chamber to produce one or more cleaned tools; inspecting the one or more cleaned tools in an inspection chamber of the multi-chamber processing tool; and transferring the one or more cleaned tools to the bonding chamber



[[Category:H01L21/67]]
[[Category:B08B1/00]]
[[Category:B08B3/04]]
[[Category:B08B7/00]]
[[Category:B08B13/00]]
[[Category:F26B25/14]]
[[Category:G06T1/00]]