View source for 17883678. Real-Time Detection of Deflections and Ruptures of EUV Pellicle Membranes simplified abstract (Intel Corporation)

=Real-Time Detection of Deflections and Ruptures of EUV Pellicle Membranes=


==Organization Name==

[[:Category:Intel Corporation|Intel Corporation]]


[[Category:Intel Corporation]]

==Inventor(s)==

[[:Category:John Ferdinand Magana of San Jose CA (US)|John Ferdinand Magana of San Jose CA (US)]][[Category:John Ferdinand Magana of San Jose CA (US)]]

[[:Category:Guojing Zhang of Saratoga CA (US)|Guojing Zhang of Saratoga CA (US)]][[Category:Guojing Zhang of Saratoga CA (US)]]

==Real-Time Detection of Deflections and Ruptures of EUV Pellicle Membranes - A simplified explanation of the abstract==


This abstract first appeared for US patent application 17883678 titled 'Real-Time Detection of Deflections and Ruptures of EUV Pellicle Membranes

==Simplified Explanation==

The patent application is for a reticle assembly with a sensor assembly that monitors the pellicle attached to the reticle.

* Reticle assembly with a reticle and pellicle attached to a pellicle support frame
* Sensor assembly with optical and sensor components to monitor the pellicle
* Optical and sensor components are coupled to a controller
* Controller is further coupled to semiconductor process tools

== Potential Applications ==
* Semiconductor manufacturing
* Lithography processes

== Problems Solved ==
* Monitoring and maintaining the integrity of the pellicle
* Ensuring quality control in semiconductor manufacturing processes

== Benefits ==
* Improved quality control in semiconductor manufacturing
* Enhanced reliability of reticle assemblies
* Increased efficiency in lithography processes


==Original Abstract Submitted==

The present disclosure is directed to a reticle assembly having a reticle and a pellicle attached to a pellicle support frame positioned on the reticle and includes a sensor assembly having optical and sensor components, which monitor the pellicle. The optical components and the sensor components of the sensor assembly may be coupled to a controller, which may be further coupled to one or more semiconductor process tools.



[[Category:G01N21/958]]