ASM IP Holding B.V. patent applications published on May 30th, 2024
Summary of the patent applications from ASM IP Holding B.V. on May 30th, 2024
Recently, ASM IP Holding B.V. has filed patents for innovative technologies in the fields of substrate cooling apparatus, load lock arrangements, equipment front-end modules (EFEM), and methods of forming organic polymers containing polyimide. These patents aim to improve processes in industries such as semiconductor manufacturing, electronics assembly, and materials processing by enhancing cooling efficiency, material transfer, and process chamber arrangement.
Summary in bullet points:
- Substrate cooling apparatus with embedded support members and coolant flow channel.
- Load lock arrangement with different accessory seats for components in semiconductor processing.
- Equipment front-end module for semiconductor processing with quad chamber arrangement.
- Methods of forming organic polymers containing polyimide and reducing polyamic acid content.
Notable applications:
- Semiconductor manufacturing equipment
- Electronic device manufacturing machinery
- Industrial cooling systems
- Semiconductor processing systems
- Material layer deposition methods
- Fabrication of semiconductor devices
- Selective deposition of material on semiconductor substrates
- Organic polymers for high-performance materials.
Contents
- 1 Patent applications for ASM IP Holding B.V. on May 30th, 2024
- 1.1 CYCLICAL DEPOSITION METHODS AND STRUCTURES FORMED USING THE METHODS (18434982)
- 1.2 SYSTEMS, DEVICES, AND METHODS FOR FORMING LAYERS COMPRISING A GROUP 14 ELEMENT, A PNICTOGEN, AND A CHALCOGEN (18518042)
- 1.3 HIGH-THROUGHPUT SILICON CARBIDE REACTOR (18523021)
- 1.4 VAPOR PHASE PRECURSOR DELIVERY SYSTEM (18517837)
- 1.5 SYSTEMS AND METHODS FOR CONTROLLING PRESSURE IN SUBSTRATE PROCESSING SYSTEMS (18518393)
- 1.6 SYSTEM AND METHOD FOR DIAGNOSING PLASMA CHAMBER (18433899)
- 1.7 METHOD OF FORMING AN ORGANIC POLYMER COMPRISING POLYIMIDE (18519172)
- 1.8 EQUIPMENT FRONT-END MODULES FOR SEMICONDUCTOR PROCESSING SYSTEMS AND METHODS OF MAKING SEMICONDUCTOR PROCESSING SYSTEMS (18522132)
- 1.9 LOAD LOCK ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING LOAD LOCK ARRANGEMENTS, AND METHODS OF MAKING LOAD LOCKS FOR SEMICONDUCTOR PROCESSING SYSTEMS (18522152)
- 1.10 METHOD, SYSTEM AND APPARATUS FOR SUBSTRATE HANDLING AND COOLING (18523172)
Patent applications for ASM IP Holding B.V. on May 30th, 2024
CYCLICAL DEPOSITION METHODS AND STRUCTURES FORMED USING THE METHODS (18434982)
Main Inventor
Trigagema Gama
SYSTEMS, DEVICES, AND METHODS FOR FORMING LAYERS COMPRISING A GROUP 14 ELEMENT, A PNICTOGEN, AND A CHALCOGEN (18518042)
Main Inventor
Bart Vermeulen
HIGH-THROUGHPUT SILICON CARBIDE REACTOR (18523021)
Main Inventor
Hichem M’Saad
VAPOR PHASE PRECURSOR DELIVERY SYSTEM (18517837)
Main Inventor
Dieter Pierreux
SYSTEMS AND METHODS FOR CONTROLLING PRESSURE IN SUBSTRATE PROCESSING SYSTEMS (18518393)
Main Inventor
Fan Gao
SYSTEM AND METHOD FOR DIAGNOSING PLASMA CHAMBER (18433899)
Main Inventor
Imran Ahmed BHUTTA
METHOD OF FORMING AN ORGANIC POLYMER COMPRISING POLYIMIDE (18519172)
Main Inventor
Andrea Illiberi
EQUIPMENT FRONT-END MODULES FOR SEMICONDUCTOR PROCESSING SYSTEMS AND METHODS OF MAKING SEMICONDUCTOR PROCESSING SYSTEMS (18522132)
Main Inventor
Mandar Deshpande
LOAD LOCK ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING LOAD LOCK ARRANGEMENTS, AND METHODS OF MAKING LOAD LOCKS FOR SEMICONDUCTOR PROCESSING SYSTEMS (18522152)
Main Inventor
Senthil Sivaraman
METHOD, SYSTEM AND APPARATUS FOR SUBSTRATE HANDLING AND COOLING (18523172)
Main Inventor
Jithin Prabha
