DEVICE INCLUDING PIEZOELECTRIC ELEMENT, STACKED SUBSTRATE, AND METHOD FOR MANUFACTURING THE DEVICE

Abstract: there is provided a device including: a semiconductor element; and a piezoelectric element having a piezoelectric film composed of alkali niobium oxide containing potassium, sodium, niobium, and oxygen, wherein the semiconductor element and the piezoelectric element are formed on the same substrate.

Inventor(s): Yasunori TANAKA, Kenji SHIBATA, Toshiaki KURODA, Kazutoshi WATANABE

CPC Classification: H10N39/00 (Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups –)

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