STACKED SUBSTRATE HAVING PIEZOELECTRIC FILM, METHOD FOR MANUFACTURING STACKED SUBSTRATE, AND PIEZOELECTRIC ELEMENT

Abstract: there is provided a stacked substrate including: a substrate; and a piezoelectric film provided on the substrate and composed of an alkali niobium oxide containing potassium, sodium, niobium, and oxygen, wherein sims analysis of a region of the substrate ranging from a surface of the substrate on which the piezoelectric film is provided to a depth of 1 �m toward a surface of the substrate opposite to the surface on which the piezoelectric film is provided, reveals that a concentration of potassium is 5e15 cmor less, and a concentration of sodium is 5e15 cmor less, and an orientation rate of crystals constituting the piezoelectric film in a (001) direction is 96% or more.

Inventor(s): Yasunori TANAKA, Kenji SHIBATA, Toshiaki KURODA, Kazutoshi WATANABE

CPC Classification: H10N30/8542 ()

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