18234937. DEPOSITION APPARATUS simplified abstract (Samsung Display Co., LTD.)
Contents
- 1 DEPOSITION APPARATUS
DEPOSITION APPARATUS
Organization Name
Inventor(s)
MINCHUL Song of Yongin-si (KR)
YOUNGSUN Cho of Yongin-si (KR)
DEPOSITION APPARATUS - A simplified explanation of the abstract
This abstract first appeared for US patent application 18234937 titled 'DEPOSITION APPARATUS
Simplified Explanation
The deposition apparatus described in the abstract is a system used for depositing material onto a target substrate while controlling the position of support parts and masking the deposition material.
- Support module with support parts coupled to the target substrate
- Base substrate connected to the support module
- Connection member linking support parts to the base substrate
- Mask assembly for masking the deposition material
- Position control parts in the support module for controlling movement along a direction axis perpendicular to the support parts' major surface
Potential Applications
The technology could be used in the manufacturing of semiconductors, solar panels, and other electronic devices that require precise deposition of materials onto substrates.
Problems Solved
This technology solves the problem of accurately depositing material onto a target substrate while controlling the position of support parts, ensuring uniform and precise deposition.
Benefits
The benefits of this technology include improved deposition accuracy, increased efficiency in material usage, and enhanced control over the deposition process.
Potential Commercial Applications
One potential commercial application of this technology could be in the production of high-performance electronic devices where precise material deposition is crucial for device functionality.
Possible Prior Art
One possible prior art for this technology could be similar deposition apparatus used in the semiconductor industry for thin film deposition processes.
What is the material used for the support parts in the deposition apparatus?
The material used for the support parts in the deposition apparatus is not specified in the abstract. It would be helpful to know the material to understand the durability and compatibility of the support parts with different deposition materials.
How does the mask assembly in the deposition apparatus function?
The abstract mentions a mask assembly configured to mask the deposition material provided to the target substrate, but it does not provide details on how the mask assembly operates. Understanding the functionality of the mask assembly would be essential to grasp the overall deposition process in the apparatus.
Original Abstract Submitted
A deposition apparatus includes: a support module having a plurality of support parts coupled to a target substrate; a base substrate coupled to the support module; a connection member for connecting the plurality of support parts to the base substrate; and a mask assembly configured to mask a deposition material provided to the target substrate. The support module further includes position control parts, which control the plurality of support parts to be movable along a direction axis perpendicular to a major surface of each of the support parts, respectively.
