Cite This Page
Bibliographic details for 18336217. SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND A METHOD OF PROCESSING A SUBSTRATE USING THE SUBSTRATE PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.)
- Page name: 18336217. SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND A METHOD OF PROCESSING A SUBSTRATE USING THE SUBSTRATE PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 31 May 2024 08:35 UTC
- Date retrieved: 31 August 2024 07:00 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18336217._SUBSTRATE_CLEANING_CHAMBER,_A_SUBSTRATE_PROCESSING_SYSTEM_INCLUDING_THE_SAME,_AND_A_METHOD_OF_PROCESSING_A_SUBSTRATE_USING_THE_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63683
- Page Version ID: 63683
Citation styles for 18336217. SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND A METHOD OF PROCESSING A SUBSTRATE USING THE SUBSTRATE PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.)
APA style
18336217. SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND A METHOD OF PROCESSING A SUBSTRATE USING THE SUBSTRATE PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.). (2024, May 31). WikiPatents, . Retrieved 07:00, August 31, 2024 from http://wikipatents.org/index.php?title=18336217._SUBSTRATE_CLEANING_CHAMBER,_A_SUBSTRATE_PROCESSING_SYSTEM_INCLUDING_THE_SAME,_AND_A_METHOD_OF_PROCESSING_A_SUBSTRATE_USING_THE_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63683.
MLA style
"18336217. SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND A METHOD OF PROCESSING A SUBSTRATE USING THE SUBSTRATE PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 31 May 2024, 08:35 UTC. 31 Aug 2024, 07:00 <http://wikipatents.org/index.php?title=18336217._SUBSTRATE_CLEANING_CHAMBER,_A_SUBSTRATE_PROCESSING_SYSTEM_INCLUDING_THE_SAME,_AND_A_METHOD_OF_PROCESSING_A_SUBSTRATE_USING_THE_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63683>.
MHRA style
WikiPatents contributors, '18336217. SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND A METHOD OF PROCESSING A SUBSTRATE USING THE SUBSTRATE PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 31 May 2024, 08:35 UTC, <http://wikipatents.org/index.php?title=18336217._SUBSTRATE_CLEANING_CHAMBER,_A_SUBSTRATE_PROCESSING_SYSTEM_INCLUDING_THE_SAME,_AND_A_METHOD_OF_PROCESSING_A_SUBSTRATE_USING_THE_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63683> [accessed 31 August 2024]
Chicago style
WikiPatents contributors, "18336217. SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND A METHOD OF PROCESSING A SUBSTRATE USING THE SUBSTRATE PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18336217._SUBSTRATE_CLEANING_CHAMBER,_A_SUBSTRATE_PROCESSING_SYSTEM_INCLUDING_THE_SAME,_AND_A_METHOD_OF_PROCESSING_A_SUBSTRATE_USING_THE_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63683 (accessed August 31, 2024).
CBE/CSE style
WikiPatents contributors. 18336217. SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND A METHOD OF PROCESSING A SUBSTRATE USING THE SUBSTRATE PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 May 31, 08:35 UTC [cited 2024 Aug 31]. Available from: http://wikipatents.org/index.php?title=18336217._SUBSTRATE_CLEANING_CHAMBER,_A_SUBSTRATE_PROCESSING_SYSTEM_INCLUDING_THE_SAME,_AND_A_METHOD_OF_PROCESSING_A_SUBSTRATE_USING_THE_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63683.
Bluebook style
18336217. SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND A METHOD OF PROCESSING A SUBSTRATE USING THE SUBSTRATE PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=18336217._SUBSTRATE_CLEANING_CHAMBER,_A_SUBSTRATE_PROCESSING_SYSTEM_INCLUDING_THE_SAME,_AND_A_METHOD_OF_PROCESSING_A_SUBSTRATE_USING_THE_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63683 (last visited August 31, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "18336217. SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND A METHOD OF PROCESSING A SUBSTRATE USING THE SUBSTRATE PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=18336217._SUBSTRATE_CLEANING_CHAMBER,_A_SUBSTRATE_PROCESSING_SYSTEM_INCLUDING_THE_SAME,_AND_A_METHOD_OF_PROCESSING_A_SUBSTRATE_USING_THE_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63683", note = "[Online; accessed 31-August-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "18336217. SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND A METHOD OF PROCESSING A SUBSTRATE USING THE SUBSTRATE PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=18336217._SUBSTRATE_CLEANING_CHAMBER,_A_SUBSTRATE_PROCESSING_SYSTEM_INCLUDING_THE_SAME,_AND_A_METHOD_OF_PROCESSING_A_SUBSTRATE_USING_THE_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63683}", note = "[Online; accessed 31-August-2024]" }