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Bibliographic details for 18336217. SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND A METHOD OF PROCESSING A SUBSTRATE USING THE SUBSTRATE PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.)

Citation styles for 18336217. SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND A METHOD OF PROCESSING A SUBSTRATE USING THE SUBSTRATE PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.)

APA style

18336217. SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND A METHOD OF PROCESSING A SUBSTRATE USING THE SUBSTRATE PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.). (2024, May 31). WikiPatents, . Retrieved 07:00, August 31, 2024 from http://wikipatents.org/index.php?title=18336217._SUBSTRATE_CLEANING_CHAMBER,_A_SUBSTRATE_PROCESSING_SYSTEM_INCLUDING_THE_SAME,_AND_A_METHOD_OF_PROCESSING_A_SUBSTRATE_USING_THE_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63683.

MLA style

"18336217. SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND A METHOD OF PROCESSING A SUBSTRATE USING THE SUBSTRATE PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 31 May 2024, 08:35 UTC. 31 Aug 2024, 07:00 <http://wikipatents.org/index.php?title=18336217._SUBSTRATE_CLEANING_CHAMBER,_A_SUBSTRATE_PROCESSING_SYSTEM_INCLUDING_THE_SAME,_AND_A_METHOD_OF_PROCESSING_A_SUBSTRATE_USING_THE_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63683>.

MHRA style

WikiPatents contributors, '18336217. SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND A METHOD OF PROCESSING A SUBSTRATE USING THE SUBSTRATE PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 31 May 2024, 08:35 UTC, <http://wikipatents.org/index.php?title=18336217._SUBSTRATE_CLEANING_CHAMBER,_A_SUBSTRATE_PROCESSING_SYSTEM_INCLUDING_THE_SAME,_AND_A_METHOD_OF_PROCESSING_A_SUBSTRATE_USING_THE_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63683> [accessed 31 August 2024]

Chicago style

WikiPatents contributors, "18336217. SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND A METHOD OF PROCESSING A SUBSTRATE USING THE SUBSTRATE PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18336217._SUBSTRATE_CLEANING_CHAMBER,_A_SUBSTRATE_PROCESSING_SYSTEM_INCLUDING_THE_SAME,_AND_A_METHOD_OF_PROCESSING_A_SUBSTRATE_USING_THE_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63683 (accessed August 31, 2024).

CBE/CSE style

WikiPatents contributors. 18336217. SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND A METHOD OF PROCESSING A SUBSTRATE USING THE SUBSTRATE PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 May 31, 08:35 UTC [cited 2024 Aug 31]. Available from: http://wikipatents.org/index.php?title=18336217._SUBSTRATE_CLEANING_CHAMBER,_A_SUBSTRATE_PROCESSING_SYSTEM_INCLUDING_THE_SAME,_AND_A_METHOD_OF_PROCESSING_A_SUBSTRATE_USING_THE_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63683.

Bluebook style

18336217. SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND A METHOD OF PROCESSING A SUBSTRATE USING THE SUBSTRATE PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=18336217._SUBSTRATE_CLEANING_CHAMBER,_A_SUBSTRATE_PROCESSING_SYSTEM_INCLUDING_THE_SAME,_AND_A_METHOD_OF_PROCESSING_A_SUBSTRATE_USING_THE_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63683 (last visited August 31, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18336217. SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND A METHOD OF PROCESSING A SUBSTRATE USING THE SUBSTRATE PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18336217._SUBSTRATE_CLEANING_CHAMBER,_A_SUBSTRATE_PROCESSING_SYSTEM_INCLUDING_THE_SAME,_AND_A_METHOD_OF_PROCESSING_A_SUBSTRATE_USING_THE_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63683",
   note = "[Online; accessed 31-August-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18336217. SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND A METHOD OF PROCESSING A SUBSTRATE USING THE SUBSTRATE PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18336217._SUBSTRATE_CLEANING_CHAMBER,_A_SUBSTRATE_PROCESSING_SYSTEM_INCLUDING_THE_SAME,_AND_A_METHOD_OF_PROCESSING_A_SUBSTRATE_USING_THE_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=63683}",
   note = "[Online; accessed 31-August-2024]"
 }


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