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Bibliographic details for 18401729. SYSTEM AND METHOD FOR THERMAL MANAGEMENT OF RETICLE IN SEMICONDUCTOR MANUFACTURING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)

Citation styles for 18401729. SYSTEM AND METHOD FOR THERMAL MANAGEMENT OF RETICLE IN SEMICONDUCTOR MANUFACTURING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)

APA style

18401729. SYSTEM AND METHOD FOR THERMAL MANAGEMENT OF RETICLE IN SEMICONDUCTOR MANUFACTURING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.). (2024, May 2). WikiPatents, . Retrieved 19:48, September 27, 2024 from http://wikipatents.org/index.php?title=18401729._SYSTEM_AND_METHOD_FOR_THERMAL_MANAGEMENT_OF_RETICLE_IN_SEMICONDUCTOR_MANUFACTURING_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=58956.

MLA style

"18401729. SYSTEM AND METHOD FOR THERMAL MANAGEMENT OF RETICLE IN SEMICONDUCTOR MANUFACTURING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)." WikiPatents, . 2 May 2024, 10:31 UTC. 27 Sep 2024, 19:48 <http://wikipatents.org/index.php?title=18401729._SYSTEM_AND_METHOD_FOR_THERMAL_MANAGEMENT_OF_RETICLE_IN_SEMICONDUCTOR_MANUFACTURING_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=58956>.

MHRA style

WikiPatents contributors, '18401729. SYSTEM AND METHOD FOR THERMAL MANAGEMENT OF RETICLE IN SEMICONDUCTOR MANUFACTURING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)', WikiPatents, , 2 May 2024, 10:31 UTC, <http://wikipatents.org/index.php?title=18401729._SYSTEM_AND_METHOD_FOR_THERMAL_MANAGEMENT_OF_RETICLE_IN_SEMICONDUCTOR_MANUFACTURING_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=58956> [accessed 27 September 2024]

Chicago style

WikiPatents contributors, "18401729. SYSTEM AND METHOD FOR THERMAL MANAGEMENT OF RETICLE IN SEMICONDUCTOR MANUFACTURING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18401729._SYSTEM_AND_METHOD_FOR_THERMAL_MANAGEMENT_OF_RETICLE_IN_SEMICONDUCTOR_MANUFACTURING_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=58956 (accessed September 27, 2024).

CBE/CSE style

WikiPatents contributors. 18401729. SYSTEM AND METHOD FOR THERMAL MANAGEMENT OF RETICLE IN SEMICONDUCTOR MANUFACTURING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) [Internet]. WikiPatents, ; 2024 May 2, 10:31 UTC [cited 2024 Sep 27]. Available from: http://wikipatents.org/index.php?title=18401729._SYSTEM_AND_METHOD_FOR_THERMAL_MANAGEMENT_OF_RETICLE_IN_SEMICONDUCTOR_MANUFACTURING_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=58956.

Bluebook style

18401729. SYSTEM AND METHOD FOR THERMAL MANAGEMENT OF RETICLE IN SEMICONDUCTOR MANUFACTURING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.), http://wikipatents.org/index.php?title=18401729._SYSTEM_AND_METHOD_FOR_THERMAL_MANAGEMENT_OF_RETICLE_IN_SEMICONDUCTOR_MANUFACTURING_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=58956 (last visited September 27, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18401729. SYSTEM AND METHOD FOR THERMAL MANAGEMENT OF RETICLE IN SEMICONDUCTOR MANUFACTURING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18401729._SYSTEM_AND_METHOD_FOR_THERMAL_MANAGEMENT_OF_RETICLE_IN_SEMICONDUCTOR_MANUFACTURING_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=58956",
   note = "[Online; accessed 27-September-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18401729. SYSTEM AND METHOD FOR THERMAL MANAGEMENT OF RETICLE IN SEMICONDUCTOR MANUFACTURING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18401729._SYSTEM_AND_METHOD_FOR_THERMAL_MANAGEMENT_OF_RETICLE_IN_SEMICONDUCTOR_MANUFACTURING_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=58956}",
   note = "[Online; accessed 27-September-2024]"
 }


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