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Bibliographic details for Samsung electronics co., ltd. (20240128056). PLASMA ETCHING APPARATUS AND OPERATING METHOD THEREOF simplified abstract
- Page name: Samsung electronics co., ltd. (20240128056). PLASMA ETCHING APPARATUS AND OPERATING METHOD THEREOF simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 20 April 2024 16:45 UTC
- Date retrieved: 27 September 2024 12:55 UTC
- Permanent URL: http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128056)._PLASMA_ETCHING_APPARATUS_AND_OPERATING_METHOD_THEREOF_simplified_abstract&oldid=54948
- Page Version ID: 54948
Citation styles for Samsung electronics co., ltd. (20240128056). PLASMA ETCHING APPARATUS AND OPERATING METHOD THEREOF simplified abstract
APA style
Samsung electronics co., ltd. (20240128056). PLASMA ETCHING APPARATUS AND OPERATING METHOD THEREOF simplified abstract. (2024, April 20). WikiPatents, . Retrieved 12:55, September 27, 2024 from http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128056)._PLASMA_ETCHING_APPARATUS_AND_OPERATING_METHOD_THEREOF_simplified_abstract&oldid=54948.
MLA style
"Samsung electronics co., ltd. (20240128056). PLASMA ETCHING APPARATUS AND OPERATING METHOD THEREOF simplified abstract." WikiPatents, . 20 Apr 2024, 16:45 UTC. 27 Sep 2024, 12:55 <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128056)._PLASMA_ETCHING_APPARATUS_AND_OPERATING_METHOD_THEREOF_simplified_abstract&oldid=54948>.
MHRA style
WikiPatents contributors, 'Samsung electronics co., ltd. (20240128056). PLASMA ETCHING APPARATUS AND OPERATING METHOD THEREOF simplified abstract', WikiPatents, , 20 April 2024, 16:45 UTC, <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128056)._PLASMA_ETCHING_APPARATUS_AND_OPERATING_METHOD_THEREOF_simplified_abstract&oldid=54948> [accessed 27 September 2024]
Chicago style
WikiPatents contributors, "Samsung electronics co., ltd. (20240128056). PLASMA ETCHING APPARATUS AND OPERATING METHOD THEREOF simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128056)._PLASMA_ETCHING_APPARATUS_AND_OPERATING_METHOD_THEREOF_simplified_abstract&oldid=54948 (accessed September 27, 2024).
CBE/CSE style
WikiPatents contributors. Samsung electronics co., ltd. (20240128056). PLASMA ETCHING APPARATUS AND OPERATING METHOD THEREOF simplified abstract [Internet]. WikiPatents, ; 2024 Apr 20, 16:45 UTC [cited 2024 Sep 27]. Available from: http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128056)._PLASMA_ETCHING_APPARATUS_AND_OPERATING_METHOD_THEREOF_simplified_abstract&oldid=54948.
Bluebook style
Samsung electronics co., ltd. (20240128056). PLASMA ETCHING APPARATUS AND OPERATING METHOD THEREOF simplified abstract, http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128056)._PLASMA_ETCHING_APPARATUS_AND_OPERATING_METHOD_THEREOF_simplified_abstract&oldid=54948 (last visited September 27, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "Samsung electronics co., ltd. (20240128056). PLASMA ETCHING APPARATUS AND OPERATING METHOD THEREOF simplified abstract --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128056)._PLASMA_ETCHING_APPARATUS_AND_OPERATING_METHOD_THEREOF_simplified_abstract&oldid=54948", note = "[Online; accessed 27-September-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "Samsung electronics co., ltd. (20240128056). PLASMA ETCHING APPARATUS AND OPERATING METHOD THEREOF simplified abstract --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128056)._PLASMA_ETCHING_APPARATUS_AND_OPERATING_METHOD_THEREOF_simplified_abstract&oldid=54948}", note = "[Online; accessed 27-September-2024]" }