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Bibliographic details for Samsung electronics co., ltd. (20240128055). APPARATUS FOR PROCESSING PLASMA AND METHOD OF PROCESSING PLASMA AND MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract

Citation styles for Samsung electronics co., ltd. (20240128055). APPARATUS FOR PROCESSING PLASMA AND METHOD OF PROCESSING PLASMA AND MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract

APA style

Samsung electronics co., ltd. (20240128055). APPARATUS FOR PROCESSING PLASMA AND METHOD OF PROCESSING PLASMA AND MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract. (2024, April 20). WikiPatents, . Retrieved 12:24, September 27, 2024 from http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128055)._APPARATUS_FOR_PROCESSING_PLASMA_AND_METHOD_OF_PROCESSING_PLASMA_AND_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=54947.

MLA style

"Samsung electronics co., ltd. (20240128055). APPARATUS FOR PROCESSING PLASMA AND METHOD OF PROCESSING PLASMA AND MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract." WikiPatents, . 20 Apr 2024, 16:45 UTC. 27 Sep 2024, 12:24 <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128055)._APPARATUS_FOR_PROCESSING_PLASMA_AND_METHOD_OF_PROCESSING_PLASMA_AND_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=54947>.

MHRA style

WikiPatents contributors, 'Samsung electronics co., ltd. (20240128055). APPARATUS FOR PROCESSING PLASMA AND METHOD OF PROCESSING PLASMA AND MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract', WikiPatents, , 20 April 2024, 16:45 UTC, <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128055)._APPARATUS_FOR_PROCESSING_PLASMA_AND_METHOD_OF_PROCESSING_PLASMA_AND_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=54947> [accessed 27 September 2024]

Chicago style

WikiPatents contributors, "Samsung electronics co., ltd. (20240128055). APPARATUS FOR PROCESSING PLASMA AND METHOD OF PROCESSING PLASMA AND MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128055)._APPARATUS_FOR_PROCESSING_PLASMA_AND_METHOD_OF_PROCESSING_PLASMA_AND_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=54947 (accessed September 27, 2024).

CBE/CSE style

WikiPatents contributors. Samsung electronics co., ltd. (20240128055). APPARATUS FOR PROCESSING PLASMA AND METHOD OF PROCESSING PLASMA AND MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract [Internet]. WikiPatents, ; 2024 Apr 20, 16:45 UTC [cited 2024 Sep 27]. Available from: http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128055)._APPARATUS_FOR_PROCESSING_PLASMA_AND_METHOD_OF_PROCESSING_PLASMA_AND_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=54947.

Bluebook style

Samsung electronics co., ltd. (20240128055). APPARATUS FOR PROCESSING PLASMA AND METHOD OF PROCESSING PLASMA AND MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract, http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128055)._APPARATUS_FOR_PROCESSING_PLASMA_AND_METHOD_OF_PROCESSING_PLASMA_AND_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=54947 (last visited September 27, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Samsung electronics co., ltd. (20240128055). APPARATUS FOR PROCESSING PLASMA AND METHOD OF PROCESSING PLASMA AND MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128055)._APPARATUS_FOR_PROCESSING_PLASMA_AND_METHOD_OF_PROCESSING_PLASMA_AND_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=54947",
   note = "[Online; accessed 27-September-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Samsung electronics co., ltd. (20240128055). APPARATUS FOR PROCESSING PLASMA AND METHOD OF PROCESSING PLASMA AND MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240128055)._APPARATUS_FOR_PROCESSING_PLASMA_AND_METHOD_OF_PROCESSING_PLASMA_AND_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=54947}",
   note = "[Online; accessed 27-September-2024]"
 }


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