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Bibliographic details for 17993055. GAS SUPPLY MODULE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

Citation styles for 17993055. GAS SUPPLY MODULE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

APA style

17993055. GAS SUPPLY MODULE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.). (2024, January 4). WikiPatents, . Retrieved 14:10, September 27, 2024 from http://wikipatents.org/index.php?title=17993055._GAS_SUPPLY_MODULE_AND_SUBSTRATE_PROCESSING_APPARATUS_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26088.

MLA style

"17993055. GAS SUPPLY MODULE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 4 Jan 2024, 09:14 UTC. 27 Sep 2024, 14:10 <http://wikipatents.org/index.php?title=17993055._GAS_SUPPLY_MODULE_AND_SUBSTRATE_PROCESSING_APPARATUS_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26088>.

MHRA style

WikiPatents contributors, '17993055. GAS SUPPLY MODULE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 4 January 2024, 09:14 UTC, <http://wikipatents.org/index.php?title=17993055._GAS_SUPPLY_MODULE_AND_SUBSTRATE_PROCESSING_APPARATUS_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26088> [accessed 27 September 2024]

Chicago style

WikiPatents contributors, "17993055. GAS SUPPLY MODULE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=17993055._GAS_SUPPLY_MODULE_AND_SUBSTRATE_PROCESSING_APPARATUS_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26088 (accessed September 27, 2024).

CBE/CSE style

WikiPatents contributors. 17993055. GAS SUPPLY MODULE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 Jan 4, 09:14 UTC [cited 2024 Sep 27]. Available from: http://wikipatents.org/index.php?title=17993055._GAS_SUPPLY_MODULE_AND_SUBSTRATE_PROCESSING_APPARATUS_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26088.

Bluebook style

17993055. GAS SUPPLY MODULE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=17993055._GAS_SUPPLY_MODULE_AND_SUBSTRATE_PROCESSING_APPARATUS_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26088 (last visited September 27, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17993055. GAS SUPPLY MODULE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=17993055._GAS_SUPPLY_MODULE_AND_SUBSTRATE_PROCESSING_APPARATUS_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26088",
   note = "[Online; accessed 27-September-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17993055. GAS SUPPLY MODULE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=17993055._GAS_SUPPLY_MODULE_AND_SUBSTRATE_PROCESSING_APPARATUS_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=26088}",
   note = "[Online; accessed 27-September-2024]"
 }


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