TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. patent applications published on November 30th, 2023
Contents
- 1 Patent applications for TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. on November 30th, 2023
- 1.1 APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE (17824930)
- 1.2 METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE (18359900)
- 1.3 SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SAME (18359892)
- 1.4 ELECTRONIC CIRCUIT AND METHOD OF ERROR CORRECTION (17827834)
- 1.5 VERTICAL POLARIZING BEAMSPLITTER FOR PHOTONICS (17751777)
- 1.6 VERTICAL GRATING COUPLER (17751773)
- 1.7 VERTICAL GRATING FILTERS FOR PHOTONICS (17751787)
- 1.8 EUV PHOTOMASK AND MANUFACTURING METHOD OF THE SAME (18361891)
- 1.9 METHOD AND SYSTEM FOR SCANNING WAFER (18359871)
- 1.10 WET PROCESSING SYSTEM AND SYSTEM AND METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE (17824926)
- 1.11 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE (17752976)
- 1.12 METHOD OF FORMING HIGH VOLTAGE TRANSISTOR AND STRUCTURE RESULTING THEREFROM (17824942)
- 1.13 SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME (17824936)
- 1.14 SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING THE SAME (18360855)
- 1.15 SEMICONDUCTOR STRUCTURE OF BACKSIDE ILLUMINATION CMOS IMAGE SENSOR AND METHOD FOR FORMING THE SAME (17824922)
- 1.16 SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME (17824924)
- 1.17 MULTILAYER STRUCTURE, CAPACITOR STRUCTURE AND ELECTRONIC DEVICE (17827837)
- 1.18 HIGH VOLTAGE DEVICE AND METHOD FOR FORMING THE SAME (17827824)
- 1.19 METHODS FOR DOPING SEMICONDUCTORS IN TRANSISTORS (17826298)
- 1.20 SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THEREOF (18232533)
- 1.21 HIGH-ELECTRON-MOBILITY TRANSISTOR AND METHOD OF MANUFACTURING (17752970)
- 1.22 SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SEMICONDUCTOR STRUCTURE (18360804)
- 1.23 METHOD FOR MANUFACTURING INTEGRATED CIRCUIT DEVICE AND INTEGRATED CIRCUIT DEVICE THEREOF (17824923)
- 1.24 HIGH-IMPLANT CHANNEL SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME (18227236)
- 1.25 CIRCUIT AND METHOD TO ENHANCE EFFICIENCY OF SEMICONDUCTOR DEVICE (18360849)
- 1.26 MEMORY DEVICE WITH BACK-GATE TRANSISTOR AND METHOD OF FORMING THE SAME (17829324)
Patent applications for TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. on November 30th, 2023
APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE (17824930)
Main Inventor
CHUN-HSI HUANG
METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE (18359900)
Main Inventor
YI-CHUAN TENG
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SAME (18359892)
Main Inventor
CHING-KAI SHEN
ELECTRONIC CIRCUIT AND METHOD OF ERROR CORRECTION (17827834)
Main Inventor
CHIA-CHUN LIAO
VERTICAL POLARIZING BEAMSPLITTER FOR PHOTONICS (17751777)
Main Inventor
Tai-Chun Huang
Brief explanation
- The patent application describes a photonic polarizing beamsplitter.
- The beamsplitter consists of a first waveguide and a second waveguide positioned above the first waveguide. - A birefringent coupler is present between the first and second waveguides. - The birefringent coupler has different effective refractive indices for TM and TE modes compared to the first waveguide. - The second waveguide is designed with outwardly tapering legs and a gap between adjacent legs, connected downstream to a body. - The innovation allows the vertical beamsplitter to occupy less surface area.
Abstract
A photonic polarizing beamsplitter is disclosed. The beamsplitter comprises a first waveguide, a second waveguide located above the first waveguide, and a birefringent coupler between the first waveguide and the second waveguide. The birefringent coupler has an effective refractive index for a TM mode which is greater than a refractive index of the first waveguide, and an effective refractive index for a TE mode which is less than the refractive index of the first waveguide. The second waveguide comprises a plurality of outwardly tapering legs with a gap between adjacent legs that are connected downstream to a body. The vertical beamsplitter uses less surface area.
VERTICAL GRATING COUPLER (17751773)
Main Inventor
Tai-Chun Huang
Brief explanation
The patent application describes a vertical grating coupler.
- The grating coupler consists of a first waveguide, a second waveguide, and a dielectric layer between them.
- The first waveguide has a first grating with ridges and gaps, and the second waveguide has a second grating with ridges and gaps.
- The first grating, second grating, and dielectric layer are positioned in a vertical overlap region between the two waveguides.
- The first and second gratings have different grating periods.
- The gaps in both gratings are filled with the dielectric layer.
Abstract
A vertical grating coupler is disclosed. The grating coupler includes a first waveguide having a first grating, a second waveguide having a second grating, and a dielectric layer positioned between the first waveguide and the second waveguide. The first grating includes a plurality of first grating ridges separated by a plurality first grating gaps, and the second grating includes a plurality of second grating ridges separated by a plurality second grating gaps. The first grating, the second grating, and the dielectric layer are located in a vertical overlap region between the first waveguide and the second waveguide. The first grating and the second grating have different grating periods, and each of the plurality of first grating gaps and second grating gaps are filled with the dielectric layer.
VERTICAL GRATING FILTERS FOR PHOTONICS (17751787)
Main Inventor
Tai-Chun Huang
Brief explanation
The abstract describes a photonic vertical grating filter that is used to improve filtering capabilities in a more compact design.
- The filter consists of a first waveguide, a second waveguide, and multiple Bragg gratings.
- The Bragg gratings are located in a vertical overlap region between the first and second waveguides.
- Each Bragg grating has a different grating period, allowing for different filtering capabilities.
- The Bragg gratings are formed in a dielectric layer between the waveguides.
- This vertical filter design requires less surface area compared to traditional filters.
- The filter provides improved filtering capabilities due to the use of multiple Bragg gratings with different grating periods.
Abstract
A photonic vertical grating filter is disclosed. The filter comprises a first waveguide, a second waveguide, and a plurality of Bragg gratings. The Bragg gratings are formed in a dielectric layer between the first waveguide and the second waveguide, and are located in a vertical overlap region between the first waveguide and the second waveguide. Each Bragg grating has a different grating period. The vertical filter uses less surface area and provides improved filtering capabilities.
EUV PHOTOMASK AND MANUFACTURING METHOD OF THE SAME (18361891)
Main Inventor
FENG YUAN HSU
METHOD AND SYSTEM FOR SCANNING WAFER (18359871)
Main Inventor
PEI-HSUAN LEE
WET PROCESSING SYSTEM AND SYSTEM AND METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE (17824926)
Main Inventor
YING-CHIEH MENG
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE (17752976)
Main Inventor
You-Ru Lin
Brief explanation
The patent application describes a semiconductor device and a method for creating such a device.
- The device includes a MEMS component with one or more MEMS pixels, a MEMS membrane substrate, and a MEMS sidewall.
- An analog circuit component is bonded to the MEMS component and includes at least one analog CMOS component within an analog circuit insulative layer and an analog circuit component substrate.
- An HPC component is bonded to the analog circuit component substrate and includes at least one HPC metal component within an HPC insulative layer, at least one bond pad, at least one bond pad via connecting the bond pad and the HPC metal component, and an HPC substrate.
- A DTC component is bonded to the HPC substrate and includes a DTC die within a DTC substrate.
Abstract
A semiconductor device and method of forming such a device includes a MEMS component including one or more MEMS pixels and having a MEMS membrane substrate and a MEMS sidewall. The semiconductor device includes an analog circuit component bonded to the MEMS component, and which includes at least one analog CMOS component within an analog circuit insulative layer, and an analog circuit component substrate. The semiconductor device includes an HPC component bonded to the analog circuit component substrate. The HPC component includes at least one HPC metal component disposed within an HPC insulative layer, at least one bond pad, at least one bond pad via connecting the at least one bond pad and the at least one HPC metal component, and an HPC substrate. Additionally, the semiconductor device includes a DTC component bonded to the HPC substrate, and which includes a DTC die disposed in a DTC substrate.
METHOD OF FORMING HIGH VOLTAGE TRANSISTOR AND STRUCTURE RESULTING THEREFROM (17824942)
Main Inventor
YUAN-CHENG YANG
SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME (17824936)
Main Inventor
JHU-MIN SONG
SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING THE SAME (18360855)
Main Inventor
WEI-LUN CHEN
SEMICONDUCTOR STRUCTURE OF BACKSIDE ILLUMINATION CMOS IMAGE SENSOR AND METHOD FOR FORMING THE SAME (17824922)
Main Inventor
CHING-HUNG KAO
SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME (17824924)
Main Inventor
JUI-LIN CHU
MULTILAYER STRUCTURE, CAPACITOR STRUCTURE AND ELECTRONIC DEVICE (17827837)
Main Inventor
HAI-DANG TRINH
HIGH VOLTAGE DEVICE AND METHOD FOR FORMING THE SAME (17827824)
Main Inventor
YU-YING LAI
METHODS FOR DOPING SEMICONDUCTORS IN TRANSISTORS (17826298)
Main Inventor
Po-Hsun Ho
Brief explanation
The patent application describes methods for creating transistors using a single layer of semiconducting material with low contact resistance.
- The source and drain terminals are positioned on opposite sides of the semiconducting layer from the gate terminal.
- A dopant layer is applied to the contact and/or spacer regions of the semiconducting layer, covering them on the surface opposite the source and drain terminals.
- The gate dielectric layer directly contacts the semiconducting layer.
- This structure allows for high mobility in the semiconducting layer and reduces contact resistance.
Abstract
Methods for making transistors with a semiconducting monolayer and low contact resistance are disclosed. The source/drain terminals are on opposite sides of the semiconducting monolayer from the gate terminal. The contact and/or spacer regions of the semiconducting monolayer are covered with a dopant layer on the surface opposite the source/drain terminals. The gate dielectric layer directly contacts the semiconducting monolayer. The resulting structure maintains high mobility in the semiconducting layer and has low contact resistance.
SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THEREOF (18232533)
Main Inventor
Ya-Yi Tsai
HIGH-ELECTRON-MOBILITY TRANSISTOR AND METHOD OF MANUFACTURING (17752970)
Main Inventor
Pravanshu Mohanta
Brief explanation
- The patent application describes a method of manufacturing a High-Electron-Mobility Transistor (HEMT).
- The method involves several steps, starting with preparing a substrate. - A first buffer is formed over the substrate, followed by a second buffer. - The second buffer is doped with a dopant such as carbon, with a gradient in concentration through its thickness. - A channel layer, such as GaN, is formed over the second buffer. - A barrier layer, such as aluminum gallium nitride (AlGaN), is formed over the channel layer. - Finally, drain, source, and gate terminals are formed for the HEMT. - The innovation lies in the specific doping technique used in the second buffer layer, which allows for a gradient in dopant concentration. - This gradient in dopant concentration may enhance the performance and efficiency of the HEMT. - The method described in the patent application provides a novel approach to manufacturing HEMTs, potentially leading to improved electronic devices.
Abstract
A method of manufacturing a High-Electron-Mobility Transistor (HEMT) includes: preparing a substrate; forming a first buffer over the substrate; forming a second buffer over the first buffer, wherein forming the second buffer includes doping a first thickness of a material such as gallium nitride (GaN) with a first concentration of a dopant such as carbon, and doping a second thickness of the material with a second concentration of the dopant such that the second concentration of dopant has a gradient though the second thickness which progressively decreases in a direction away from the first thickness; forming a channel layer such as a GaN channel over the second buffer; forming a barrier layer such as aluminum gallium nitride (AlGaN) over the channel layer; and forming drain, source and gate terminals for the HEMT.
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SEMICONDUCTOR STRUCTURE (18360804)
Main Inventor
CHUN-YEN PENG
METHOD FOR MANUFACTURING INTEGRATED CIRCUIT DEVICE AND INTEGRATED CIRCUIT DEVICE THEREOF (17824923)
Main Inventor
WEI-KANG LIU
HIGH-IMPLANT CHANNEL SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME (18227236)
Main Inventor
Chia-Chung CHEN
Brief explanation
The patent application describes a method for manufacturing a semiconductor device with an upper-channel implant transistor.
- The method involves creating fins on a substrate, with a first region and second regions on either side.
- A dopant is implanted in the upper portion of the first region of the fins, but not in the second regions or lower portion of the first region.
- A gate structure is formed over the first region of the fins, extending in a perpendicular direction.
- Source/drains are formed over the second regions of the fins.
- This process results in the creation of an upper-channel implant transistor.
Abstract
A method for manufacturing a semiconductor device including an upper-channel implant transistor is provided. The method includes forming one or more fins extending in a first direction over a substrate. The one or more fins include a first region along the first direction and second regions on both sides of the first region along the first direction. A dopant is shallowly implanted in an upper portion of the first region of the fins but not in the second regions and not in a lower portion of the first region of the fins. A gate structure extending in a second direction perpendicular to the first direction is formed overlying the first region of the fins, and source/drains are formed overlying the second regions of the fins, thereby forming an upper-channel implant transistor.
CIRCUIT AND METHOD TO ENHANCE EFFICIENCY OF SEMICONDUCTOR DEVICE (18360849)
Main Inventor
BEI-SHING LIEN
MEMORY DEVICE WITH BACK-GATE TRANSISTOR AND METHOD OF FORMING THE SAME (17829324)
Main Inventor
MENG-HAN LIN